Analysis of the growth of RF sputtered ZnO thin films using the optical reflective second harmonic generation

Kuang Yao Lo, Shih Chieh Lo, Sheng Yuan Chu, Ren Chuan Chang, Chang Feng Yu

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

Reflective second harmonic generation (RSHG) is used to analyze the growth condition of poly crystal zinc oxide (ZnO) film with a c-axis orientation, grown on the Si substrate by RF magnetron sputtering technique. It elucidates physical phenomena exhibited by growing ZnO thin films. Connecting with analytical results of the characteristic parameters derived from the X-ray patterns and SEM images, the relationship between the RSHG intensity and the substrate temperature reveals that the effect of the grain boundaries is the domination of the RSHG mechanism. The inclined structures of ZnO films on the Si substrate are explained with reference to these RSHG patterns.

Original languageEnglish
Pages (from-to)532-538
Number of pages7
JournalJournal of Crystal Growth
Volume290
Issue number2
DOIs
Publication statusPublished - 2006 May 1

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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