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Analysis of the nanoimprint lithography with a viscous model
Wen-Bin Young
Department of Aeronautics and Astronautics
International Bachelor Degree Program on Energy Engineering
Research output
:
Contribution to journal
›
Article
›
peer-review
86
Citations (Scopus)
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Engineering & Materials Science
Nanoimprint lithography
100%
Polymers
47%
Lithography
14%
Flow patterns
12%
Fluids
8%
Temperature
5%
Costs
4%
Physics & Astronomy
lithography
53%
polymers
37%
embossing
34%
touch
15%
viscous fluids
14%
travel
12%
flow distribution
10%
simulation
4%
temperature
3%
Chemical Compounds
Embossing
47%
Flow
31%
Pressure
27%
Simulation
10%
Time
5%