Analysts of microstructure of magnetic Fe3C nanograins embedded in amorphous carbon films

Y. H. Lee, T. C. Han, J. C.A. Huang, C. R. Lin

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


Amorphous carbon films containing magnetic nanograins of pure Fe 3C phase were fabricated using dc magnetron co-sputtering system. The crystallinity and the size of Fe3C grains were improved from the as-deposited films by annealing. A grain size of 18 nm was obtained at the annealing temperature of 550°C.

Original languageEnglish
Pages (from-to)1975-1978
Number of pages4
JournalJournal of Applied Physics
Issue number3
Publication statusPublished - 2003 Aug 1

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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