Analytical modelling of ultra-thin gas squeeze film

Wang Long Li

doi:10.1088/0957-4484/10/4/314

Analytical modelling of ultra-thin gas squeeze film

Wang Long Li

Research output: Contribution to journal › Article › peer-review

45 Citations (Scopus)

Abstract

In this study, the characteristics of an ultra-thin gas squeeze film are analyzed using the modified molecular gas film lubrication (MMGL) equation with coupled roughness and rarefaction effects taken into consideration. A modified squeeze number (Σ) and modified plate aspect ratio (β) are proposed to estimate molecular gas film lubrication characteristics. Using Σ, β and a simple mapping method, the linearized MMGL problem can be reduced to the continuum gas film problem and the MGL characteristics can be exactly estimated if the pressure flow factors (φ_X^P, φ_Y^P) and the rarefaction coefficient (Q̄_P(D)) are known. The present models are computationally compact, and thus applicable to simulation of a microelectromechanical system.

Original language	English
Pages (from-to)	440-446
Number of pages	7
Journal	Nanotechnology
Volume	10
Issue number	4
DOIs	https://doi.org/10.1088/0957-4484/10/4/314
Publication status	Published - 1999 Dec

All Science Journal Classification (ASJC) codes

Bioengineering
General Chemistry
General Materials Science
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0957-4484/10/4/314

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abstract = "In this study, the characteristics of an ultra-thin gas squeeze film are analyzed using the modified molecular gas film lubrication (MMGL) equation with coupled roughness and rarefaction effects taken into consideration. A modified squeeze number (Σ) and modified plate aspect ratio (β) are proposed to estimate molecular gas film lubrication characteristics. Using Σ, β and a simple mapping method, the linearized MMGL problem can be reduced to the continuum gas film problem and the MGL characteristics can be exactly estimated if the pressure flow factors (φXP, φYP) and the rarefaction coefficient ({\=Q}P(D)) are known. The present models are computationally compact, and thus applicable to simulation of a microelectromechanical system.",

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AB - In this study, the characteristics of an ultra-thin gas squeeze film are analyzed using the modified molecular gas film lubrication (MMGL) equation with coupled roughness and rarefaction effects taken into consideration. A modified squeeze number (Σ) and modified plate aspect ratio (β) are proposed to estimate molecular gas film lubrication characteristics. Using Σ, β and a simple mapping method, the linearized MMGL problem can be reduced to the continuum gas film problem and the MGL characteristics can be exactly estimated if the pressure flow factors (φXP, φYP) and the rarefaction coefficient (Q̄P(D)) are known. The present models are computationally compact, and thus applicable to simulation of a microelectromechanical system.

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VL - 10

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EP - 446

JO - Nanotechnology

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Analytical modelling of ultra-thin gas squeeze film

Abstract

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