Analytical modelling of ultra-thin gas squeeze film

Research output: Contribution to journalArticle

38 Citations (Scopus)

Abstract

In this study, the characteristics of an ultra-thin gas squeeze film are analyzed using the modified molecular gas film lubrication (MMGL) equation with coupled roughness and rarefaction effects taken into consideration. A modified squeeze number (Σ) and modified plate aspect ratio (β) are proposed to estimate molecular gas film lubrication characteristics. Using Σ, β and a simple mapping method, the linearized MMGL problem can be reduced to the continuum gas film problem and the MGL characteristics can be exactly estimated if the pressure flow factors (φ X P , φ Y P ) and the rarefaction coefficient (Q̄ P (D)) are known. The present models are computationally compact, and thus applicable to simulation of a microelectromechanical system.

Original languageEnglish
Pages (from-to)440-446
Number of pages7
JournalNanotechnology
Volume10
Issue number4
DOIs
Publication statusPublished - 1999 Dec 1

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Gases
Lubrication
Factor X
MEMS
Aspect ratio
Surface roughness

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

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Analytical modelling of ultra-thin gas squeeze film. / Li, Wang-Long.

In: Nanotechnology, Vol. 10, No. 4, 01.12.1999, p. 440-446.

Research output: Contribution to journalArticle

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