Analyzing properties of pizeoelectric substrates incoporating finite element method

Shumiing T. Wang, Shen Whan Chen, Jen-Fa Huan, Chun Chieh Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Surface acoustic wave (SAW) devices are of great interest for chemical and biochemical sensing applications. As the new piezoelectric materials are produced and the development of SAW device substrates expands from single-layer to multi-layer, analyzing the properties of piezoelectric substrates becomes more and more difficult. In this paper, a method that applies finite element (FEM) simulator to analyze piezoelectric substrates was developed. To verify the feasibility of the proposed method, the coupling-of-modes (COM) parameters of piezoelectric substrate were calculated and then applied to design a SAW device. The simulation result of the device is compared with that obtained by equivalent circuit model.

Original languageEnglish
Title of host publication2010 International Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2010
Pages578-581
Number of pages4
DOIs
Publication statusPublished - 2010 Jun 10
EventInternational Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2010 - Changsha, China
Duration: 2010 Mar 132010 Mar 14

Publication series

Name2010 International Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2010
Volume1

Other

OtherInternational Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2010
CountryChina
CityChangsha
Period10-03-1310-03-14

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering

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  • Cite this

    Wang, S. T., Chen, S. W., Huan, J-F., & Lin, C. C. (2010). Analyzing properties of pizeoelectric substrates incoporating finite element method. In 2010 International Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2010 (pp. 578-581). [5458840] (2010 International Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2010; Vol. 1). https://doi.org/10.1109/ICMTMA.2010.809