Angular vertical comb-driven tunable capacitor with high-tuning capabilities

Hung D. Nguyen, Dooyoung Hah, Pamela R. Patterson, Ru-Min Chao, Wibool Piyawattanametha, Erwin K. Lau, Ming C. Wu

Research output: Contribution to journalArticle

55 Citations (Scopus)

Abstract

This paper reports on a novel tunable capacitor with electrostatic angular vertical comb-drive (AVC) actuators. The AVC tunable capacitor creates a large offset in comb fingers through a small rotation angle - an advantage not found in conventional lateral comb-drive devices. High capacitance and large continuous tuning ratio is achieved in a compact device area. The largest tuning varactor demonstrates capacitance values between 0.27-8.6 pF - a tuning ratio of more than 31:1, the highest ever reported. The maximum quality factor Q is 273 at 1 GHz near the minimum capacitance value.

Original languageEnglish
Pages (from-to)406-413
Number of pages8
JournalJournal of Microelectromechanical Systems
Volume13
Issue number3
DOIs
Publication statusPublished - 2004 Jun 1

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Capacitors
Capacitance
Tuning
Varactors
Electrostatics
Actuators

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Nguyen, H. D., Hah, D., Patterson, P. R., Chao, R-M., Piyawattanametha, W., Lau, E. K., & Wu, M. C. (2004). Angular vertical comb-driven tunable capacitor with high-tuning capabilities. Journal of Microelectromechanical Systems, 13(3), 406-413. https://doi.org/10.1109/JMEMS.2004.828741
Nguyen, Hung D. ; Hah, Dooyoung ; Patterson, Pamela R. ; Chao, Ru-Min ; Piyawattanametha, Wibool ; Lau, Erwin K. ; Wu, Ming C. / Angular vertical comb-driven tunable capacitor with high-tuning capabilities. In: Journal of Microelectromechanical Systems. 2004 ; Vol. 13, No. 3. pp. 406-413.
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Nguyen, HD, Hah, D, Patterson, PR, Chao, R-M, Piyawattanametha, W, Lau, EK & Wu, MC 2004, 'Angular vertical comb-driven tunable capacitor with high-tuning capabilities', Journal of Microelectromechanical Systems, vol. 13, no. 3, pp. 406-413. https://doi.org/10.1109/JMEMS.2004.828741

Angular vertical comb-driven tunable capacitor with high-tuning capabilities. / Nguyen, Hung D.; Hah, Dooyoung; Patterson, Pamela R.; Chao, Ru-Min; Piyawattanametha, Wibool; Lau, Erwin K.; Wu, Ming C.

In: Journal of Microelectromechanical Systems, Vol. 13, No. 3, 01.06.2004, p. 406-413.

Research output: Contribution to journalArticle

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