Antimony tin oxide (ATO) films were sputtered on glass substrates using RF reactive magnetron sputtering at a power of 100 W, a substrate temperature of 300 °C and an oxygen flow rate ranging from 7 to 20 sccm. The films were annealed for 1 h in oxygen and nitrogen atmospheres at temperatures of 300, 400 and 500 °C. Annealing effect was studied by comparing the electrical and optical properties of the annealed and unannealed films.
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry