Anti-reflection nano-structures fabricated on curved surface of glass lens based on metal contact printing lithography

Wei Xiang Su, Chun Yin Wu, Yung Chun Lee

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

This paper reports the fabrication of subwavelength nano-structures on the curved surface of a glass lens for the purposes of anti-reflection. It utilizes a flexible PDMS mold to transfer metallic patterns to the lens surface which is pre-coated with a polymer layer. Using the transferred metal pattern as an etching mask, nano-structures are directly fabricated on the lens surface by plasma dry-etching processes. A plano/convex lens made of BK-7 glass with a lens diameter of 12.7 mm and a radius of curvature of 25.8 mm is used in this paper. Hexagonally arrayed nano-structures with a truncated conical profile, a center-to-center pitch of 300 nm, and a maximum structure height of 290 nm are experimentally achieved. Measurement results show the optical transmittance is increased by about 2.4% in average for wavelength within visible light spectrum. The directly fabricated nano-structures also exhibit good anti-glaring effects and the potentials for further optical applications.

Original languageEnglish
Pages (from-to)15-20
Number of pages6
JournalMicroelectronic Engineering
Volume214
DOIs
Publication statusPublished - 2019 Jun 1

Fingerprint

curved surfaces
printing
Lithography
Printing
electric contacts
Lenses
lithography
Metals
lenses
Glass
glass
metals
etching
Plasma etching
Opacity
Masks
Etching
transmittance
Polymers
masks

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

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title = "Anti-reflection nano-structures fabricated on curved surface of glass lens based on metal contact printing lithography",
abstract = "This paper reports the fabrication of subwavelength nano-structures on the curved surface of a glass lens for the purposes of anti-reflection. It utilizes a flexible PDMS mold to transfer metallic patterns to the lens surface which is pre-coated with a polymer layer. Using the transferred metal pattern as an etching mask, nano-structures are directly fabricated on the lens surface by plasma dry-etching processes. A plano/convex lens made of BK-7 glass with a lens diameter of 12.7 mm and a radius of curvature of 25.8 mm is used in this paper. Hexagonally arrayed nano-structures with a truncated conical profile, a center-to-center pitch of 300 nm, and a maximum structure height of 290 nm are experimentally achieved. Measurement results show the optical transmittance is increased by about 2.4{\%} in average for wavelength within visible light spectrum. The directly fabricated nano-structures also exhibit good anti-glaring effects and the potentials for further optical applications.",
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AU - Su, Wei Xiang

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N2 - This paper reports the fabrication of subwavelength nano-structures on the curved surface of a glass lens for the purposes of anti-reflection. It utilizes a flexible PDMS mold to transfer metallic patterns to the lens surface which is pre-coated with a polymer layer. Using the transferred metal pattern as an etching mask, nano-structures are directly fabricated on the lens surface by plasma dry-etching processes. A plano/convex lens made of BK-7 glass with a lens diameter of 12.7 mm and a radius of curvature of 25.8 mm is used in this paper. Hexagonally arrayed nano-structures with a truncated conical profile, a center-to-center pitch of 300 nm, and a maximum structure height of 290 nm are experimentally achieved. Measurement results show the optical transmittance is increased by about 2.4% in average for wavelength within visible light spectrum. The directly fabricated nano-structures also exhibit good anti-glaring effects and the potentials for further optical applications.

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