Application of taguchi method to the optimization of a-C:H coatings deposited using ion beam assisted physical vapor deposition

W. H. Kao, Y. L. Su, J. H. Horng, S. H. Yao, H. C. Huang

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1 Citation (Scopus)

Abstract

The Taguchi designmethod is used to optimize the adhesion, hardness, and wear resistance properties of a-C:H coatings deposited on AISIM2 steel substrates using the ion beam assisted physical vapor deposition method.The adhesion strength of the coatings is evaluated by means of scratch tests, while the hardness is measured using a nanoindentation tester. Finally, the wear resistance is evaluated by performing cyclic ball-on-disc wear tests. The Taguchi experimental results show that the optimal deposition parameters are as follows: a substrate bias voltage of 90V, an ion beam voltage of 1 kV, an acetylene flow rate of 21 sccm, and a working distance of 7 cm. Given these optimal processing conditions, the a-C:H coating has a critical load of 99.8N, a hardness of 25.5 GPa, and a wear rate of 0.4 × 10-6 mm3/Nm.

Original languageEnglish
Article number582653
JournalAdvances in Mechanical Engineering
Volume7
Issue number2
DOIs
Publication statusPublished - 2015

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

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