Applications of piezoelectric ZnO film deposited on diamond-like carbon coated onto Si substrate under fabricated diamond SAW filter

I. Tseng Tang; Han Jan Chen; W. C. Hwang; Y. C. Wang; Mau Phon Houng; Yeong Her Wang

doi:10.1016/j.jcrysgro.2003.10.081

Applications of piezoelectric ZnO film deposited on diamond-like carbon coated onto Si substrate under fabricated diamond SAW filter

I. Tseng Tang, Han Jan Chen, W. C. Hwang, Y. C. Wang, Mau Phon Houng, Yeong Her Wang

Research output: Contribution to journal › Article › peer-review

34 Citations (Scopus)

Abstract

The applications of surface acoustic wave (SAW) devices aim directly at piezoelectric thin films deposited onto amorphous diamond-like carbon (DLC) coated on silicon substrates from target ZnO in this study. Our high-velocity SAW filters are characterized using multi-layer structures of thin films by DLC depositing. However, if propagating velocity of diamond is much higher, then the SAW phase velocity of piezoelectric thin film ZnO deposited on DLC coated onto Si substrate is raised from 2800 to11430m/s. Consequently, the GHz-band SAW devices could be fabricated using thin films of DLC without sub-micron photolithography technology. We have been also successfully fabricated and demonstrated the diamond-like SAW filters by evaporating interdigital transducers on ZnO thin films with ULSI technology.

Original language	English
Pages (from-to)	461-466
Number of pages	6
Journal	Journal of Crystal Growth
Volume	262
Issue number	1-4
DOIs	https://doi.org/10.1016/j.jcrysgro.2003.10.081
Publication status	Published - 2004 Feb 15

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Inorganic Chemistry
Materials Chemistry

Access to Document

10.1016/j.jcrysgro.2003.10.081

Cite this

@article{b715d4b985ac4ee9a92c3e47d1c2f3a5,

title = "Applications of piezoelectric ZnO film deposited on diamond-like carbon coated onto Si substrate under fabricated diamond SAW filter",

abstract = "The applications of surface acoustic wave (SAW) devices aim directly at piezoelectric thin films deposited onto amorphous diamond-like carbon (DLC) coated on silicon substrates from target ZnO in this study. Our high-velocity SAW filters are characterized using multi-layer structures of thin films by DLC depositing. However, if propagating velocity of diamond is much higher, then the SAW phase velocity of piezoelectric thin film ZnO deposited on DLC coated onto Si substrate is raised from 2800 to11430m/s. Consequently, the GHz-band SAW devices could be fabricated using thin films of DLC without sub-micron photolithography technology. We have been also successfully fabricated and demonstrated the diamond-like SAW filters by evaporating interdigital transducers on ZnO thin films with ULSI technology.",

author = "Tang, {I. Tseng} and Chen, {Han Jan} and Hwang, {W. C.} and Wang, {Y. C.} and Houng, {Mau Phon} and Wang, {Yeong Her}",

note = "Funding Information: This work was sponsored by the National Science Council under the contract number of NSC 91-2215-E006-020.",

year = "2004",

month = feb,

day = "15",

doi = "10.1016/j.jcrysgro.2003.10.081",

language = "English",

volume = "262",

pages = "461--466",

journal = "Journal of Crystal Growth",

issn = "0022-0248",

publisher = "Elsevier",

number = "1-4",

}

TY - JOUR

T1 - Applications of piezoelectric ZnO film deposited on diamond-like carbon coated onto Si substrate under fabricated diamond SAW filter

AU - Tang, I. Tseng

AU - Chen, Han Jan

AU - Hwang, W. C.

AU - Wang, Y. C.

AU - Houng, Mau Phon

AU - Wang, Yeong Her

N1 - Funding Information: This work was sponsored by the National Science Council under the contract number of NSC 91-2215-E006-020.

PY - 2004/2/15

Y1 - 2004/2/15

N2 - The applications of surface acoustic wave (SAW) devices aim directly at piezoelectric thin films deposited onto amorphous diamond-like carbon (DLC) coated on silicon substrates from target ZnO in this study. Our high-velocity SAW filters are characterized using multi-layer structures of thin films by DLC depositing. However, if propagating velocity of diamond is much higher, then the SAW phase velocity of piezoelectric thin film ZnO deposited on DLC coated onto Si substrate is raised from 2800 to11430m/s. Consequently, the GHz-band SAW devices could be fabricated using thin films of DLC without sub-micron photolithography technology. We have been also successfully fabricated and demonstrated the diamond-like SAW filters by evaporating interdigital transducers on ZnO thin films with ULSI technology.

AB - The applications of surface acoustic wave (SAW) devices aim directly at piezoelectric thin films deposited onto amorphous diamond-like carbon (DLC) coated on silicon substrates from target ZnO in this study. Our high-velocity SAW filters are characterized using multi-layer structures of thin films by DLC depositing. However, if propagating velocity of diamond is much higher, then the SAW phase velocity of piezoelectric thin film ZnO deposited on DLC coated onto Si substrate is raised from 2800 to11430m/s. Consequently, the GHz-band SAW devices could be fabricated using thin films of DLC without sub-micron photolithography technology. We have been also successfully fabricated and demonstrated the diamond-like SAW filters by evaporating interdigital transducers on ZnO thin films with ULSI technology.

UR - http://www.scopus.com/inward/record.url?scp=0842329997&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0842329997&partnerID=8YFLogxK

U2 - 10.1016/j.jcrysgro.2003.10.081

DO - 10.1016/j.jcrysgro.2003.10.081

M3 - Article

AN - SCOPUS:0842329997

SN - 0022-0248

VL - 262

SP - 461

EP - 466

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 1-4

ER -

Applications of piezoelectric ZnO film deposited on diamond-like carbon coated onto Si substrate under fabricated diamond SAW filter

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this