Applications of piezoelectric ZnO film deposited on diamond-like carbon coated onto Si substrate under fabricated diamond SAW filter

I. Tseng Tang, Han Jan Chen, W. C. Hwang, Y. C. Wang, Mau Phon Houng, Yeong Her Wang

Research output: Contribution to journalArticlepeer-review

28 Citations (Scopus)

Abstract

The applications of surface acoustic wave (SAW) devices aim directly at piezoelectric thin films deposited onto amorphous diamond-like carbon (DLC) coated on silicon substrates from target ZnO in this study. Our high-velocity SAW filters are characterized using multi-layer structures of thin films by DLC depositing. However, if propagating velocity of diamond is much higher, then the SAW phase velocity of piezoelectric thin film ZnO deposited on DLC coated onto Si substrate is raised from 2800 to11430m/s. Consequently, the GHz-band SAW devices could be fabricated using thin films of DLC without sub-micron photolithography technology. We have been also successfully fabricated and demonstrated the diamond-like SAW filters by evaporating interdigital transducers on ZnO thin films with ULSI technology.

Original languageEnglish
Pages (from-to)461-466
Number of pages6
JournalJournal of Crystal Growth
Volume262
Issue number1-4
DOIs
Publication statusPublished - 2004 Feb 15

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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