TY - GEN
T1 - Arrayed metallic micro/nano particles for localized surface plasmon resonance based on metal contact transfer lithography
AU - Chung, H. Y.
AU - Wu, C. Y.
AU - Chen, C. H.
AU - Lee, Y. C.
PY - 2012
Y1 - 2012
N2 - In this study, we demonstrate a rapidly, low cost, and mass production process to fabricate arrayed metallic nanoparticles on a variety of substrates based on contact transfer and metal mask embedded lithography (CMEL). A hexagonal arrayed metallic nanoparticles deployed on ITO/glass substrate with sub-micron periodicity is achieved. It is observed in optical transmittance measurements that noble metallic arrayed nanoparticles deployed on ITO/glass substrate result in a spectrally narrowband of extinction in visible range, and is in good agreement with the simulated results using finite-element method (FEM). It is found that the narrowband extinction spectrum is associated with electromagnetic field coupling between the arrayed metallic nanostructures and the ITO layer. This electromagnetic field coupling induces significant plasmon resonance in the ITO layer underneath the arrayed metallic nanostructures. Based on this observed phenomenon and our innovative large-area nano-fabrication processes, optoelectronic devices with arrayed metallic nanostructures can be easily designed and developed.
AB - In this study, we demonstrate a rapidly, low cost, and mass production process to fabricate arrayed metallic nanoparticles on a variety of substrates based on contact transfer and metal mask embedded lithography (CMEL). A hexagonal arrayed metallic nanoparticles deployed on ITO/glass substrate with sub-micron periodicity is achieved. It is observed in optical transmittance measurements that noble metallic arrayed nanoparticles deployed on ITO/glass substrate result in a spectrally narrowband of extinction in visible range, and is in good agreement with the simulated results using finite-element method (FEM). It is found that the narrowband extinction spectrum is associated with electromagnetic field coupling between the arrayed metallic nanostructures and the ITO layer. This electromagnetic field coupling induces significant plasmon resonance in the ITO layer underneath the arrayed metallic nanostructures. Based on this observed phenomenon and our innovative large-area nano-fabrication processes, optoelectronic devices with arrayed metallic nanostructures can be easily designed and developed.
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U2 - 10.1109/NEMS.2012.6196788
DO - 10.1109/NEMS.2012.6196788
M3 - Conference contribution
AN - SCOPUS:84861551185
SN - 9781467311243
T3 - 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
SP - 339
EP - 342
BT - 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
PB - IEEE Computer Society
T2 - 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
Y2 - 5 March 2012 through 8 March 2012
ER -