Automated surface profile measurement of diamond grid disk by phase-shifted shadow Moiré

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Diamond grid disk dresser is frequently employed to remove the accumulated debris lest the polishing surface glazes. The surface warpage of diamond grid disk must be small enough to assure the flatness of polished wafers during chemical mechanical planarization process. In this study, phase-shifted shadow moiré method was employed to measure the surface profile of diamond grid disk. To eliminate erroneous bright or black spots caused by the diamond grids, a new approach is proposed by automatically selecting a proper threshold value from the differentiated image resulting from the addition of four phase-shifted images. According to the largest size of erroneous spot, the size of a structuring element is determined for morphology filtering. Thereafter the phase can be calculated and unwrapped correctly. Test of the method on a diamond grid disk is demonstrated and discussed.

Original languageEnglish
Title of host publicationInternational Conference on Experimental Mechanics 2013 and Twelfth Asian Conference on Experimental Mechanics
PublisherSPIE
ISBN (Print)9781628412888
DOIs
Publication statusPublished - 2014 Jan 1
EventInternational Conference on Experimental Mechanics 2013, ICEM 2013 and the 12th Asian Conference on Experimental Mechanics, ACEM 2013 - Bangkok, Thailand
Duration: 2013 Nov 252013 Nov 27

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9234
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherInternational Conference on Experimental Mechanics 2013, ICEM 2013 and the 12th Asian Conference on Experimental Mechanics, ACEM 2013
CountryThailand
CityBangkok
Period13-11-2513-11-27

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Chen, T. Y-F., & Lin, J. (2014). Automated surface profile measurement of diamond grid disk by phase-shifted shadow Moiré. In International Conference on Experimental Mechanics 2013 and Twelfth Asian Conference on Experimental Mechanics [92340W] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9234). SPIE. https://doi.org/10.1117/12.2055396