Automatic polishing of super accuracy mirror mold with free-form surface by curvature analysis

M. J. Tsai, Jing-Jing Fang, J. F. Huang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

This paper proposed a polishing path planning method of super accuracy mirror mold with free-form surface by curvature analysis. First, IGES files of free-form surfaces are read and the mold geometry is regenerated as B-spline surface by the Automatic Mold Polishing System (AMPS). By using the derivative properties of B-spline surface, normal vector and principal curvatures at any point of the surface are calculated. In addition, the effective contact width between polishing tool and mold surface based on the grain size and the principal radii of curvature is also determined. The minimum contact width in 3-D is mapped onto the (u, v) parameters of B-spline surface. Then a modified Peano fractal path with weaving function is calculated based on the effective contact width in the (u, v) coordinate. This Peano-weaving path was tested on an optical mold with free-form surface. The polishing result shows the method is very effective and achieves the level of mirror surface with roughness Ra 29nm.

Original languageEnglish
Title of host publicationProgress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture
Pages547-552
Number of pages6
EditionPART 1
Publication statusPublished - 2006 Dec 1
Event2005 International Conference on Advanced Manufacture, ICAM2005 - Taipei, R.O.C., Taiwan
Duration: 2005 Nov 282005 Dec 2

Publication series

NameMaterials Science Forum
NumberPART 1
Volume505-507
ISSN (Print)0255-5476

Other

Other2005 International Conference on Advanced Manufacture, ICAM2005
CountryTaiwan
CityTaipei, R.O.C.
Period05-11-2805-12-02

Fingerprint

Polishing
polishing
Mirrors
curvature
mirrors
splines
weaving
Splines
trajectory planning
Motion planning
files
Fractals
fractals
roughness
grain size
Surface roughness
Derivatives
radii
Geometry
geometry

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Tsai, M. J., Fang, J-J., & Huang, J. F. (2006). Automatic polishing of super accuracy mirror mold with free-form surface by curvature analysis. In Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture (PART 1 ed., pp. 547-552). (Materials Science Forum; Vol. 505-507, No. PART 1).
Tsai, M. J. ; Fang, Jing-Jing ; Huang, J. F. / Automatic polishing of super accuracy mirror mold with free-form surface by curvature analysis. Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture. PART 1. ed. 2006. pp. 547-552 (Materials Science Forum; PART 1).
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Tsai, MJ, Fang, J-J & Huang, JF 2006, Automatic polishing of super accuracy mirror mold with free-form surface by curvature analysis. in Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture. PART 1 edn, Materials Science Forum, no. PART 1, vol. 505-507, pp. 547-552, 2005 International Conference on Advanced Manufacture, ICAM2005, Taipei, R.O.C., Taiwan, 05-11-28.

Automatic polishing of super accuracy mirror mold with free-form surface by curvature analysis. / Tsai, M. J.; Fang, Jing-Jing; Huang, J. F.

Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture. PART 1. ed. 2006. p. 547-552 (Materials Science Forum; Vol. 505-507, No. PART 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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N2 - This paper proposed a polishing path planning method of super accuracy mirror mold with free-form surface by curvature analysis. First, IGES files of free-form surfaces are read and the mold geometry is regenerated as B-spline surface by the Automatic Mold Polishing System (AMPS). By using the derivative properties of B-spline surface, normal vector and principal curvatures at any point of the surface are calculated. In addition, the effective contact width between polishing tool and mold surface based on the grain size and the principal radii of curvature is also determined. The minimum contact width in 3-D is mapped onto the (u, v) parameters of B-spline surface. Then a modified Peano fractal path with weaving function is calculated based on the effective contact width in the (u, v) coordinate. This Peano-weaving path was tested on an optical mold with free-form surface. The polishing result shows the method is very effective and achieves the level of mirror surface with roughness Ra 29nm.

AB - This paper proposed a polishing path planning method of super accuracy mirror mold with free-form surface by curvature analysis. First, IGES files of free-form surfaces are read and the mold geometry is regenerated as B-spline surface by the Automatic Mold Polishing System (AMPS). By using the derivative properties of B-spline surface, normal vector and principal curvatures at any point of the surface are calculated. In addition, the effective contact width between polishing tool and mold surface based on the grain size and the principal radii of curvature is also determined. The minimum contact width in 3-D is mapped onto the (u, v) parameters of B-spline surface. Then a modified Peano fractal path with weaving function is calculated based on the effective contact width in the (u, v) coordinate. This Peano-weaving path was tested on an optical mold with free-form surface. The polishing result shows the method is very effective and achieves the level of mirror surface with roughness Ra 29nm.

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Tsai MJ, Fang J-J, Huang JF. Automatic polishing of super accuracy mirror mold with free-form surface by curvature analysis. In Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture. PART 1 ed. 2006. p. 547-552. (Materials Science Forum; PART 1).