Automatic virtual metrology system design and implementation

Yi Ting Huang, Hsien Cheng Huang, Fan Tien Cheng, Tai Siang Liao, Fu Chien Chang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)

Abstract

An automatic virtual metrology (AVM) system that consists of a model-creation server and many AVM servers is proposed. The model-creation server will generate the first set of data quality evaluation models and virtual metrology (VM) conjecture models of a certain equipment type. Under fab-wide VM deployment, the model-creation server can also fan out the first set of models generated to all the AVM servers of the same equipment type. Also, each individual fan-out-accepter's AVM server can perform an automatic model refreshing process to promptly refresh its own data quality evaluation models and VM conjecture models. As such, the VM accuracy can be maintained and the AVM server is then ready to serve. This paper gives an overview to the AVM system and elaborates the automatic data quality evaluation schemes and the automatic model refreshing schemes.

Original languageEnglish
Title of host publication4th IEEE Conference on Automation Science and Engineering, CASE 2008
Pages223-229
Number of pages7
DOIs
Publication statusPublished - 2008 Nov 3
Event4th IEEE Conference on Automation Science and Engineering, CASE 2008 - Washington, DC, United States
Duration: 2008 Aug 232008 Aug 26

Publication series

Name4th IEEE Conference on Automation Science and Engineering, CASE 2008

Other

Other4th IEEE Conference on Automation Science and Engineering, CASE 2008
CountryUnited States
CityWashington, DC
Period08-08-2308-08-26

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Huang, Y. T., Huang, H. C., Cheng, F. T., Liao, T. S., & Chang, F. C. (2008). Automatic virtual metrology system design and implementation. In 4th IEEE Conference on Automation Science and Engineering, CASE 2008 (pp. 223-229). [4626524] (4th IEEE Conference on Automation Science and Engineering, CASE 2008). https://doi.org/10.1109/COASE.2008.4626524