AZO electrodes deposited by atomic layer deposition for OLED fabrication

B. Dugrenil, I. Séguy, Hsin Ying Lee, T. Camps, Y. C. Lin, J. B. Doucet, Y. S. Chiu, L. Salvagnac, E. Bedel-Pereira, M. Ternisien, C. T. Lee, V. Bardinal

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)


In this work, we present a comparative study of optimized AZO electrodes deposited by Atomic Layer Deposition (ALD) with commercial ITO in terms of electrical, optical and structural properties. Despite a lower figure of merit mainly due to a higher sheet resistance, AZO-based OLEDs are shown to present a current density five times higher than ITO-based ones for the same applied voltage. These AZO electrodes fabricated by ALD could thus be promising substitutes for conventional ITO anodes in organic electronic devices.

Original languageEnglish
Title of host publicationOrganic Photonics VI
ISBN (Print)9781628410853
Publication statusPublished - 2014
EventOrganic Photonics VI - Brussels, Belgium
Duration: 2014 Apr 152014 Apr 16

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


OtherOrganic Photonics VI

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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