Batch assembly micro-ball lens array for Si-based optical coupling platform in free space

S. C. Shen, C. T. Pan, H. P. Chou, Y. H. Chao, K. L. Lin, Jauh Jung Yang Jauh Jung

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


The paper presents novel concepts of batch fabrication of micro-ball lens array technology integrated on the silicon-based wafer by low temperature wafer bonding by which can improve appropriate distance of optical fiber coupling. The silicon based coupling platform consists of the self-parking framework, micro-ball lens array, and precision platform for optical fiber coupling purpose. The structure of optical platform is able to improve distance of between fiber and micro-ball lens and increase coupling efficiency. The micro-ball lens array is batch fabricated by polymeric material and melting photoresist through low temperature wafer bonding. Then batch assembly onto each other flat-topped mesa that adjoins to the v-groove. The comer compensation offers a method to fabricate self-parking framework and flat-topped mesa in the intersection of two v-grooves. This fabrication process not only provides accurate coupling distance between fibers and micro-ball lens hut also reduces micro-assembly cost.

Original languageEnglish
Pages (from-to)326-333
Number of pages8
JournalProceedings of SPIE-The International Society for Optical Engineering
Publication statusPublished - 2001 Jan 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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