BioMEMS, theory and practice of MEMS/NEMS, and sensors

Research output: Contribution to journalEditorial

Original languageEnglish
Article number031001
JournalJournal of Micro/Nanolithography, MEMS, and MOEMS
Volume9
Issue number3
DOIs
Publication statusPublished - 2010 Jan 1

Fingerprint

BioMEMS
NEMS
microelectromechanical systems
MEMS
sensors
Sensors

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

@article{c49fb94289424d969acdeb2de6573cdb,
title = "BioMEMS, theory and practice of MEMS/NEMS, and sensors",
author = "Yu-Cheng Lin",
year = "2010",
month = "1",
day = "1",
doi = "10.1117/1.3496936",
language = "English",
volume = "9",
journal = "Journal of Micro/ Nanolithography, MEMS, and MOEMS",
issn = "1932-5150",
publisher = "SPIE",
number = "3",

}

BioMEMS, theory and practice of MEMS/NEMS, and sensors. / Lin, Yu-Cheng.

In: Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 9, No. 3, 031001, 01.01.2010.

Research output: Contribution to journalEditorial

TY - JOUR

T1 - BioMEMS, theory and practice of MEMS/NEMS, and sensors

AU - Lin, Yu-Cheng

PY - 2010/1/1

Y1 - 2010/1/1

UR - http://www.scopus.com/inward/record.url?scp=80455145320&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=80455145320&partnerID=8YFLogxK

U2 - 10.1117/1.3496936

DO - 10.1117/1.3496936

M3 - Editorial

VL - 9

JO - Journal of Micro/ Nanolithography, MEMS, and MOEMS

JF - Journal of Micro/ Nanolithography, MEMS, and MOEMS

SN - 1932-5150

IS - 3

M1 - 031001

ER -