Bottom oxidation through STI (BOTS) - A novel approach to fabricate dielectric isolated FinFETs on bulk substrates

K. Cheng, S. Seo, J. Faltermeier, D. Lu, T. Standaert, I. Ok, A. Khakifirooz, R. Vega, T. Levin, J. Li, J. Demarest, C. Surisetty, D. Song, H. Utomo, R. Chao, H. He, A. Madan, P. Dehaven, N. Klymko, Z. ZhuS. Naczas, Y. Yin, J. Kuss, A. Jacob, D. Bae, K. Seo, W. Kleemeier, R. Sampson, T. Hook, B. Haran, G. Gifford, D. Gupta, H. Shang, H. Bu, M. Na, P. Oldiges, T. Wu, B. Doris, K. Rim, E. Nowak, R. Divakaruni, M. Khare

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Citations (Scopus)

Abstract

We report a novel approach to enable the fabrication of dielectric isolated FinFETs on bulk substrates by bottom oxidation through STI (BOTS). BOTS FinFET transistors are manufactured with 42nm fin pitch and 80nm contacted gate pitch. Competitive device performances are achieved with effective drive currents of Ieff (N/P) = 621/453 μA/μm at Ioff = 10 nA/μm at VDD = 0.8 V. The BOTS process results in a sloped fin profile at the fin bottom (fin tail). By extending the gate vertically into the fin tail region, the parasitic short-channel effects due to this fin tail have been successfully suppressed. We further demonstrate the extension of the BOTS process to the fabrication of strained SiGe FinFETs and nanowires, providing a path for future CMOS technologies.

Original languageEnglish
Title of host publicationDigest of Technical Papers - Symposium on VLSI Technology
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479933310
DOIs
Publication statusPublished - 2014 Sep 8
Event34th Symposium on VLSI Technology, VLSIT 2014 - Honolulu, United States
Duration: 2014 Jun 92014 Jun 12

Publication series

NameDigest of Technical Papers - Symposium on VLSI Technology
ISSN (Print)0743-1562

Other

Other34th Symposium on VLSI Technology, VLSIT 2014
CountryUnited States
CityHonolulu
Period14-06-0914-06-12

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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