Carbon-based composite thin films for use as microelectrode

H. L. Lee, Jyh-Ming Ting

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

This paper describes a process for fabricating Pt-containing diamond-like carbon (Pt-DLC) composite thin films for use as microelectrode. Two sputter deposition techniques were used to prepare the sample thin films. In a sputter deposition process, the target used was a 99.99% pure graphite with different amounts of platinum coupons on the surface. In the other process, a reactive sputter deposition technique was employed. The target was a 99.99% pure platinum. In both cases DLC or Pt-DLC composite thin films were obtained using different deposition conditions. The resulting Pt-DLC composite thin films were subject to various analysis for the physical properties. Among them, improved electrical conductivity and reduced film stress were also found due to the addition of platinum into DLC.

Original languageEnglish
Pages (from-to)567-570
Number of pages4
JournalMaterials Chemistry and Physics
Volume82
Issue number3
DOIs
Publication statusPublished - 2003 Dec 20

Fingerprint

Microelectrodes
Composite films
Sputter deposition
Diamond
Carbon
Platinum
Thin films
Diamonds
platinum
composite materials
carbon
diamonds
thin films
Graphite
graphite
Physical properties
physical properties
electrical resistivity

All Science Journal Classification (ASJC) codes

  • Materials Chemistry

Cite this

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abstract = "This paper describes a process for fabricating Pt-containing diamond-like carbon (Pt-DLC) composite thin films for use as microelectrode. Two sputter deposition techniques were used to prepare the sample thin films. In a sputter deposition process, the target used was a 99.99{\%} pure graphite with different amounts of platinum coupons on the surface. In the other process, a reactive sputter deposition technique was employed. The target was a 99.99{\%} pure platinum. In both cases DLC or Pt-DLC composite thin films were obtained using different deposition conditions. The resulting Pt-DLC composite thin films were subject to various analysis for the physical properties. Among them, improved electrical conductivity and reduced film stress were also found due to the addition of platinum into DLC.",
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Carbon-based composite thin films for use as microelectrode. / Lee, H. L.; Ting, Jyh-Ming.

In: Materials Chemistry and Physics, Vol. 82, No. 3, 20.12.2003, p. 567-570.

Research output: Contribution to journalArticle

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AB - This paper describes a process for fabricating Pt-containing diamond-like carbon (Pt-DLC) composite thin films for use as microelectrode. Two sputter deposition techniques were used to prepare the sample thin films. In a sputter deposition process, the target used was a 99.99% pure graphite with different amounts of platinum coupons on the surface. In the other process, a reactive sputter deposition technique was employed. The target was a 99.99% pure platinum. In both cases DLC or Pt-DLC composite thin films were obtained using different deposition conditions. The resulting Pt-DLC composite thin films were subject to various analysis for the physical properties. Among them, improved electrical conductivity and reduced film stress were also found due to the addition of platinum into DLC.

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