TY - JOUR
T1 - Carbon-based composite thin films for use as microelectrode
AU - Lee, H. L.
AU - Ting, Jyh Ming
N1 - Funding Information:
This work was supported by the National Science Council in Taiwan under Grant # NSC89-2218-E-006-012 and NSC9 1-2120-E-006-002.
PY - 2003/12/20
Y1 - 2003/12/20
N2 - This paper describes a process for fabricating Pt-containing diamond-like carbon (Pt-DLC) composite thin films for use as microelectrode. Two sputter deposition techniques were used to prepare the sample thin films. In a sputter deposition process, the target used was a 99.99% pure graphite with different amounts of platinum coupons on the surface. In the other process, a reactive sputter deposition technique was employed. The target was a 99.99% pure platinum. In both cases DLC or Pt-DLC composite thin films were obtained using different deposition conditions. The resulting Pt-DLC composite thin films were subject to various analysis for the physical properties. Among them, improved electrical conductivity and reduced film stress were also found due to the addition of platinum into DLC.
AB - This paper describes a process for fabricating Pt-containing diamond-like carbon (Pt-DLC) composite thin films for use as microelectrode. Two sputter deposition techniques were used to prepare the sample thin films. In a sputter deposition process, the target used was a 99.99% pure graphite with different amounts of platinum coupons on the surface. In the other process, a reactive sputter deposition technique was employed. The target was a 99.99% pure platinum. In both cases DLC or Pt-DLC composite thin films were obtained using different deposition conditions. The resulting Pt-DLC composite thin films were subject to various analysis for the physical properties. Among them, improved electrical conductivity and reduced film stress were also found due to the addition of platinum into DLC.
UR - https://www.scopus.com/pages/publications/0344515432
UR - https://www.scopus.com/pages/publications/0344515432#tab=citedBy
U2 - 10.1016/S0254-0584(03)00313-4
DO - 10.1016/S0254-0584(03)00313-4
M3 - Article
AN - SCOPUS:0344515432
SN - 0254-0584
VL - 82
SP - 567
EP - 570
JO - Materials Chemistry and Physics
JF - Materials Chemistry and Physics
IS - 3
ER -