Changes in surface roughness and work function of indium-tin-oxide due to KrF excimer laser irradiation

Yow Jon Lin; Iain D. Baikie; Wei Yang Chou; Shih Ting Lin; Hsing Cheng Chang; Yao Ming Chen; Wen Fung Liu

doi:10.1116/1.1953670

Changes in surface roughness and work function of indium-tin-oxide due to KrF excimer laser irradiation

Yow Jon Lin, Iain D. Baikie, Wei Yang Chou, Shih Ting Lin, Hsing Cheng Chang, Yao Ming Chen, Wen Fung Liu

Department of Photonics

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Abstract

In this study, from the observed x-ray photoelectron spectroscopy and atomic force microscopy results, and Kelvin probe measurements, it is suggested that the induced indium-tin-oxide (ITO) surface chemical changes by KrF excimer laser irradiation had strong effects on the surface work function (SWF) and surface roughness of ITO. During the laser irradiation, the incorporation of O2 2- peroxo species or the dissolution of oxygen species near the ITO surface leads to the reduction of the surface roughness and an increase in the SWF. In addition, it is worth noting that the laser-irradiated ITO sample has an excellent stability in the SWF.

Original language	English
Pages (from-to)	1305-1308
Number of pages	4
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	23
Issue number	5
DOIs	https://doi.org/10.1116/1.1953670
Publication status	Published - 2005 Sept

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1116/1.1953670

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@article{0519594c16a94a0899ff4f987466063f,

title = "Changes in surface roughness and work function of indium-tin-oxide due to KrF excimer laser irradiation",

abstract = "In this study, from the observed x-ray photoelectron spectroscopy and atomic force microscopy results, and Kelvin probe measurements, it is suggested that the induced indium-tin-oxide (ITO) surface chemical changes by KrF excimer laser irradiation had strong effects on the surface work function (SWF) and surface roughness of ITO. During the laser irradiation, the incorporation of O2 2- peroxo species or the dissolution of oxygen species near the ITO surface leads to the reduction of the surface roughness and an increase in the SWF. In addition, it is worth noting that the laser-irradiated ITO sample has an excellent stability in the SWF.",

author = "Lin, {Yow Jon} and Baikie, {Iain D.} and Chou, {Wei Yang} and Lin, {Shih Ting} and Chang, {Hsing Cheng} and Chen, {Yao Ming} and Liu, {Wen Fung}",

note = "Funding Information: This project is supported by National Science Council of Taiwan, Republic of China. The KP measurements were kindly provided by KP Technology, Ltd.",

year = "2005",

month = sep,

doi = "10.1116/1.1953670",

language = "English",

volume = "23",

pages = "1305--1308",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "5",

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TY - JOUR

T1 - Changes in surface roughness and work function of indium-tin-oxide due to KrF excimer laser irradiation

AU - Lin, Yow Jon

AU - Baikie, Iain D.

AU - Chou, Wei Yang

AU - Lin, Shih Ting

AU - Chang, Hsing Cheng

AU - Chen, Yao Ming

AU - Liu, Wen Fung

N1 - Funding Information: This project is supported by National Science Council of Taiwan, Republic of China. The KP measurements were kindly provided by KP Technology, Ltd.

PY - 2005/9

Y1 - 2005/9

N2 - In this study, from the observed x-ray photoelectron spectroscopy and atomic force microscopy results, and Kelvin probe measurements, it is suggested that the induced indium-tin-oxide (ITO) surface chemical changes by KrF excimer laser irradiation had strong effects on the surface work function (SWF) and surface roughness of ITO. During the laser irradiation, the incorporation of O2 2- peroxo species or the dissolution of oxygen species near the ITO surface leads to the reduction of the surface roughness and an increase in the SWF. In addition, it is worth noting that the laser-irradiated ITO sample has an excellent stability in the SWF.

AB - In this study, from the observed x-ray photoelectron spectroscopy and atomic force microscopy results, and Kelvin probe measurements, it is suggested that the induced indium-tin-oxide (ITO) surface chemical changes by KrF excimer laser irradiation had strong effects on the surface work function (SWF) and surface roughness of ITO. During the laser irradiation, the incorporation of O2 2- peroxo species or the dissolution of oxygen species near the ITO surface leads to the reduction of the surface roughness and an increase in the SWF. In addition, it is worth noting that the laser-irradiated ITO sample has an excellent stability in the SWF.

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JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 5

ER -

Changes in surface roughness and work function of indium-tin-oxide due to KrF excimer laser irradiation

Abstract

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