Abstract
In this study, from the observed x-ray photoelectron spectroscopy and atomic force microscopy results, and Kelvin probe measurements, it is suggested that the induced indium-tin-oxide (ITO) surface chemical changes by KrF excimer laser irradiation had strong effects on the surface work function (SWF) and surface roughness of ITO. During the laser irradiation, the incorporation of O2 2- peroxo species or the dissolution of oxygen species near the ITO surface leads to the reduction of the surface roughness and an increase in the SWF. In addition, it is worth noting that the laser-irradiated ITO sample has an excellent stability in the SWF.
| Original language | English |
|---|---|
| Pages (from-to) | 1305-1308 |
| Number of pages | 4 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 23 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 2005 Sep 1 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
Cite this
}
Changes in surface roughness and work function of indium-tin-oxide due to KrF excimer laser irradiation. / Lin, Yow Jon; Baikie, Iain D.; Chou, Wei-Yang; Lin, Shih Ting; Chang, Hsing Cheng; Chen, Yao Ming; Liu, Wen Fung.
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 23, No. 5, 01.09.2005, p. 1305-1308.Research output: Contribution to journal › Article
TY - JOUR
T1 - Changes in surface roughness and work function of indium-tin-oxide due to KrF excimer laser irradiation
AU - Lin, Yow Jon
AU - Baikie, Iain D.
AU - Chou, Wei-Yang
AU - Lin, Shih Ting
AU - Chang, Hsing Cheng
AU - Chen, Yao Ming
AU - Liu, Wen Fung
PY - 2005/9/1
Y1 - 2005/9/1
N2 - In this study, from the observed x-ray photoelectron spectroscopy and atomic force microscopy results, and Kelvin probe measurements, it is suggested that the induced indium-tin-oxide (ITO) surface chemical changes by KrF excimer laser irradiation had strong effects on the surface work function (SWF) and surface roughness of ITO. During the laser irradiation, the incorporation of O2 2- peroxo species or the dissolution of oxygen species near the ITO surface leads to the reduction of the surface roughness and an increase in the SWF. In addition, it is worth noting that the laser-irradiated ITO sample has an excellent stability in the SWF.
AB - In this study, from the observed x-ray photoelectron spectroscopy and atomic force microscopy results, and Kelvin probe measurements, it is suggested that the induced indium-tin-oxide (ITO) surface chemical changes by KrF excimer laser irradiation had strong effects on the surface work function (SWF) and surface roughness of ITO. During the laser irradiation, the incorporation of O2 2- peroxo species or the dissolution of oxygen species near the ITO surface leads to the reduction of the surface roughness and an increase in the SWF. In addition, it is worth noting that the laser-irradiated ITO sample has an excellent stability in the SWF.
UR - http://www.scopus.com/inward/record.url?scp=31144431784&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=31144431784&partnerID=8YFLogxK
U2 - 10.1116/1.1953670
DO - 10.1116/1.1953670
M3 - Article
AN - SCOPUS:31144431784
VL - 23
SP - 1305
EP - 1308
JO - Journal of Vacuum Science and Technology A
JF - Journal of Vacuum Science and Technology A
SN - 0734-2101
IS - 5
ER -