Chapter 4 SiGe/Si processing

D. Y.C. Lie, K. L. Wang

Research output: Chapter in Book/Report/Conference proceedingChapter

4 Citations (Scopus)
Original languageEnglish
Title of host publicationSemiconductors and Semimetals
PublisherAcademic Press Inc.
Pages151-197
Number of pages47
EditionC
DOIs
Publication statusPublished - 2001

Publication series

NameSemiconductors and Semimetals
NumberC
Volume73
ISSN (Print)0080-8784

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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