TY - GEN
T1 - Characteristic evaluation of silicon-based MEMS acoustic/acceleration sensor
AU - Chao, Ru Min
AU - Li, Sie Yu
AU - Hsu, Chih Chao
AU - Liang, Steven Y.
PY - 2007
Y1 - 2007
N2 - Due to its smallness in size and economic-saving in batch fabrication, the acoustic micro sensor shows many potential applications in the field of manufacturing and machining monitoring system if it can help to pick up information of sound and vibration signals at specific range. In this paper, brief discussion for the design of the micro-sensor and its fabrication issue will be made. Fundamental frequency testing results by the piezo-electric shaker and acoustic measurement within the water tank are given. A 6-inch silicon wafer fabrication process and sensor design having resonant frequency in the range of 20k-60k Hz are presented and discussed. By selecting appropriate thickness of the structure layer on a SOI wafer, it is possible to customer-make a microsensor to sense within a given-range of interest and to apply it in a manufacturing monitoring system.
AB - Due to its smallness in size and economic-saving in batch fabrication, the acoustic micro sensor shows many potential applications in the field of manufacturing and machining monitoring system if it can help to pick up information of sound and vibration signals at specific range. In this paper, brief discussion for the design of the micro-sensor and its fabrication issue will be made. Fundamental frequency testing results by the piezo-electric shaker and acoustic measurement within the water tank are given. A 6-inch silicon wafer fabrication process and sensor design having resonant frequency in the range of 20k-60k Hz are presented and discussed. By selecting appropriate thickness of the structure layer on a SOI wafer, it is possible to customer-make a microsensor to sense within a given-range of interest and to apply it in a manufacturing monitoring system.
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U2 - 10.1115/MSEC2007-31131
DO - 10.1115/MSEC2007-31131
M3 - Conference contribution
AN - SCOPUS:37349124614
SN - 0791842908
SN - 9780791842904
T3 - Proceedings of the ASME International Manufacturing Science and Engineering Conference 2007, MSEC2007
SP - 389
EP - 394
BT - American Society of Mechanical Engineers
T2 - 2007 ASME International Conference on Manufacturing Science and Engineering
Y2 - 15 January 2007 through 18 October 2007
ER -