TY - JOUR
T1 - Characteristics of a Pt/NiO thin film-based ammonia gas sensor
AU - Chen, Huey Ing
AU - Hsiao, Cheng Yu
AU - Chen, Wei Cheng
AU - Chang, Ching Hong
AU - Chou, Tzu Chieh
AU - Liu, I. Ping
AU - Lin, Kun Wei
AU - Liu, Wen Chau
N1 - Funding Information:
Part of this work was supported by the National Science Council of the Republic of China under Contract No . NSC-100-2221-E-006-244-MY3 , and the Advanced Optoelectronic Technology Center , National Cheng Kung University .
PY - 2018/3
Y1 - 2018/3
N2 - The sensing characteristics of a Pt/NiO thin film-based resistor-type ammonia gas sensor are comprehensively studied and demonstrated. Experimentally, the studied Pt/NiO ammonia gas sensor exhibits improved performance, including a higher sensing response of ratio of 1278%, an extremely low detection limit of 10 ppb NH3/air, and fast speeds, at an optimal operating temperature of 300 °C. Based on the advantages indicated above and the benefits of its simple structure, relatively easy fabrication, and inherent p-type semiconductor properties, the studied device is promising for high-performance ammonia gas sensing and complementary metal oxide sensor (CMOS) array applications.
AB - The sensing characteristics of a Pt/NiO thin film-based resistor-type ammonia gas sensor are comprehensively studied and demonstrated. Experimentally, the studied Pt/NiO ammonia gas sensor exhibits improved performance, including a higher sensing response of ratio of 1278%, an extremely low detection limit of 10 ppb NH3/air, and fast speeds, at an optimal operating temperature of 300 °C. Based on the advantages indicated above and the benefits of its simple structure, relatively easy fabrication, and inherent p-type semiconductor properties, the studied device is promising for high-performance ammonia gas sensing and complementary metal oxide sensor (CMOS) array applications.
UR - http://www.scopus.com/inward/record.url?scp=85030866269&partnerID=8YFLogxK
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U2 - 10.1016/j.snb.2017.10.032
DO - 10.1016/j.snb.2017.10.032
M3 - Article
AN - SCOPUS:85030866269
VL - 256
SP - 962
EP - 967
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
SN - 0925-4005
ER -