Characteristics of a Pt/NiO thin film-based ammonia gas sensor

Huey-Ing Chen, Cheng Yu Hsiao, Wei Cheng Chen, Ching Hong Chang, Tzu Chieh Chou, I-Ping Liu, Kun Wei Lin, Wen-Chau Liu

Research output: Contribution to journalArticle

25 Citations (Scopus)

Abstract

The sensing characteristics of a Pt/NiO thin film-based resistor-type ammonia gas sensor are comprehensively studied and demonstrated. Experimentally, the studied Pt/NiO ammonia gas sensor exhibits improved performance, including a higher sensing response of ratio of 1278%, an extremely low detection limit of 10 ppb NH3/air, and fast speeds, at an optimal operating temperature of 300 °C. Based on the advantages indicated above and the benefits of its simple structure, relatively easy fabrication, and inherent p-type semiconductor properties, the studied device is promising for high-performance ammonia gas sensing and complementary metal oxide sensor (CMOS) array applications.

Original languageEnglish
Pages (from-to)962-967
Number of pages6
JournalSensors and Actuators, B: Chemical
Volume256
DOIs
Publication statusPublished - 2018 Mar 1

Fingerprint

Chemical sensors
Ammonia
ammonia
Thin films
sensors
thin films
gases
Sensor arrays
Resistors
Oxides
p-type semiconductors
Gases
Metals
operating temperature
resistors
Semiconductor materials
metal oxides
Fabrication
Air
fabrication

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Chen, Huey-Ing ; Hsiao, Cheng Yu ; Chen, Wei Cheng ; Chang, Ching Hong ; Chou, Tzu Chieh ; Liu, I-Ping ; Lin, Kun Wei ; Liu, Wen-Chau. / Characteristics of a Pt/NiO thin film-based ammonia gas sensor. In: Sensors and Actuators, B: Chemical. 2018 ; Vol. 256. pp. 962-967.
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Characteristics of a Pt/NiO thin film-based ammonia gas sensor. / Chen, Huey-Ing; Hsiao, Cheng Yu; Chen, Wei Cheng; Chang, Ching Hong; Chou, Tzu Chieh; Liu, I-Ping; Lin, Kun Wei; Liu, Wen-Chau.

In: Sensors and Actuators, B: Chemical, Vol. 256, 01.03.2018, p. 962-967.

Research output: Contribution to journalArticle

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