Characteristics of aligned carbon nanotubes synthesized using a high-rate low-temperature process

Kun Hou Liao, Jyh-Ming Ting

Research output: Contribution to journalArticlepeer-review

26 Citations (Scopus)

Abstract

In this paper, we report the characteristics of carbon nanotubes grown on a novel Fe-Si thin film catalysts at a substrate temperature of 370 °C. The catalyst thin films were prepared using a sputter deposition method. The growth of carbon nanotubes was performed in a microwave plasma chemical vapor deposition (MPCVD) reactor under various methane to hydrogen ratios and different growth times. We have shown that the CNTs grown at a temperature as low as 370 °C and a very high growth rate of 13 μm/min exhibit microstructures as good as those obtained at higher temperatures and lower growth rates. We have also provided evidences to support the assumption and augment made in a previously reported growth mechanism.

Original languageEnglish
Pages (from-to)1210-1216
Number of pages7
JournalDiamond and Related Materials
Volume15
Issue number9
DOIs
Publication statusPublished - 2006 Sep 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

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