Characteristics of proton-exchanged wet etching on z-cut nickel-indiffused lithium niobate

W. C. Chang, S. J. Chang, C. Y. Sue, C. L. Hsu

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

In this letter, the wet etching technique is utilized to determine the proton exchange (PE) depth of z-cut nickel-indiffused lithium niobate under different nickel indiffusion parameters. It is demonstrated that the existence of nickel atoms reduces the PE depth. While this result was applied to the fabrication of a ridge-type waveguide, the tilt angle of the sidewall on the ridge waveguide was about 70°, which has been successfully increased.

Original languageEnglish
Pages (from-to)250-252
Number of pages3
JournalMicrowave and Optical Technology Letters
Volume18
Issue number4
DOIs
Publication statusPublished - 1998 Jul

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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