Abstract
In this letter, the wet etching technique is utilized to determine the proton exchange (PE) depth of z-cut nickel-indiffused lithium niobate under different nickel indiffusion parameters. It is demonstrated that the existence of nickel atoms reduces the PE depth. While this result was applied to the fabrication of a ridge-type waveguide, the tilt angle of the sidewall on the ridge waveguide was about 70°, which has been successfully increased.
| Original language | English |
|---|---|
| Pages (from-to) | 250-252 |
| Number of pages | 3 |
| Journal | Microwave and Optical Technology Letters |
| Volume | 18 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 1998 Jul |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering
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