Characteristics of Si/SiO2 interface properties for CMOS fabricated on hybrid orientation substrate using amorphization/templated recrystallization (ATR) method

Po Chin Huang, San Lein Wu, Shoou Jinn Chang, Yao Tsung Huang, Jone F. Chen, Chien Ting Lin, Mike Ma, Osbert Cheng

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds