Characteristics of transparent conductive Al-doped ZnO and Ag-Ti tri-layer thin films prepared by multi-target magnetron sputtering

W. C. Shih, K. S. Kao, D. L. Cheng, C. J. Chung, P. T. Hsieh, S. L. Ou

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

Al-doped ZnO (AZO) and Ag-Ti films were successfully deposited on glass substrates by multi-target magnetron sputtering to form the high transparent AZO/Ag-Ti/AZO multilayer. The optical, electrical properties and lifetime performance were investigated at various AZO and Ag-Ti thicknesses. As the AZO thickness was fixed at 10nm and Ag-Ti thickness was varied between 6 and 22nm, it can be found that AZO10nm/Ag-Ti10nm/AZO10nm possessed good conductivity and highest transmittance in visible region. Then an AZO thickness adjustment of 10-90nm was performed. With increasing AZO thickness from 10 to 70nm, the transmittances of AZO10-70nm/Ag-Ti10nm/AZO10-70nm films were all above 80% in the visible region and optimal transparency can be reached at AZO thickness of 70nm. Although the conductivity in AZO/Ag-Ti/AZO films was decreased with increasing Ag-Ti thickness, the resistivity of 4.95×10-4Ω-cm in AZO70nm/Ag-Ti10nm/AZO70nm was still acceptable. From the lifetime tests under normal circumstance, these multilayers almost showed the same transmittance and resistivity from 0 to 90days. Furthermore, the AZO70nm/Ag-Ti10nm/AZO70nm exhibits the highest figure of merit of 8.93×10-3Ω-1, indicating that the multilayer has high potential in optoelectronic applications.

Original languageEnglish
Pages (from-to)139-143
Number of pages5
JournalSurface and Coatings Technology
Volume219
DOIs
Publication statusPublished - 2013 Mar 25

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Fingerprint Dive into the research topics of 'Characteristics of transparent conductive Al-doped ZnO and Ag-Ti tri-layer thin films prepared by multi-target magnetron sputtering'. Together they form a unique fingerprint.

  • Cite this