Characterization of dual hollow cathode arc chemical vapor deposition by optical emission spectroscopy

Engineering & Materials Science

• Optical emission spectroscopy 100%
• Chemical vapor deposition 69%
• Cathodes 59%
• Electrons 48%
• Substrates 42%
• Electron temperature 41%
• Atoms 24%
• Diamonds 23%
• Plasmas 22%
• Chemical activation 10%

Physics & Astronomy

• hollow cathodes 69%
• optical emission spectroscopy 68%
• arcs 49%
• vapor deposition 45%
• electron bombardment 43%
• thresholds 36%
• characterization 33%
• diamonds 13%
• electron energy 12%
• atom concentration 11%
• activation 6%
• shift 5%
• atoms 4%