Characterization of gallium-doped zinc oxide contact on n-type gallium nitride epitaxial layers

J. K. Sheu, K. H. Chang, M. L. Lee, J. F. Huang, K. S. Kang, W. L. Wang, W. C. Lai, T. H. Hsueh

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3 Citations (Scopus)


This study demonstrates the electrical characteristics of Ga-doped ZnO (GZO) thin films deposited onto n-type GaN (n-GaN) epitaxial layers with a variety of electron concentrations. The ohmic characteristics could be obtained from the GZO/n-GaN samples after a thermal annealing process was performed at 800°C in a nitrogen atmosphere for 1 min when the n-GaN layers had a carrier concentration of approximately 1× 1019 cm-3. The specific contact resistance (ρ c) was as low as 2.6× 10-4 cm2. The ohmic characteristics can be attributed to the fact that the heavy doping of n-GaN layers and the low resistivity GZO film can result in a carrier transport via a tunneling mechanism at the GZO/GaN interface. However, the GZO/n-GaN samples exhibited nonlinear current-voltage (I-V) characteristics (i.e., a Schottky contact) when the annealing temperature (TA) was lower than or equal to 600°C even though the carrier concentration of n-GaN reached 1× 1019 cm-3. These GZO/n-GaN Schottky contacts were due to the low carrier concentration of GZO films and/or n-GaN layers. The effective Schottky barrier heights of the 700°C annealed GZO/n-GaN (n∼ 1016 cm-3) samples were around 0.73 and 0.75 eV, which were deduced from the I-V and capacitance-voltage characteristics, respectively.

Original languageEnglish
Pages (from-to)H679-H683
JournalJournal of the Electrochemical Society
Issue number8
Publication statusPublished - 2009

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry


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