@inproceedings{47ba8422156140d2b6cca3ef44b4dc2c,
title = "Characterization of Nb-doped MgZnO films grown by a radio-frequency magnetron sputtering system",
abstract = "Niobium-doped MgxZn1-xO (Nb-MZO) mixed oxide films with high transmittance were successfully deposited on sapphire substrates by a radio-frequency (RF) magnetron sputtering using a 4-in ZnO/MgO/NbOx (75/20/5 wt %) target. In this study, the films were analyzed through a Hall test, X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and transmittance. The XRD results showed MgO2 (002) wurtzite peak as well as an MgxZn1-xO (111)-cubic peak. The absorption edges of these Nb-MZO films were located in the UV region, implying that the MgO content of the Nb-MZO layer increased the bandgaps. The XPS spectra of Nb-MZO films were also used to analyze the composition of the as-grown and annealed Nb-MZO films. These results indicate that the Nb-MZO films are ideal for use as transparent contact layers.",
author = "Hsueh, {Kuang Po} and Lin, {Wen Yen} and Chiu, {Hsien Chin} and Wang, {Hsiang Chun} and Sheu, {Jinn Kong} and Yeh, {Yu Hsiang}",
year = "2015",
month = aug,
day = "31",
doi = "10.1109/IBP.2015.7230765",
language = "English",
series = "IBP 2015 - 2015 IEEE International Broadband and Photonics Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "55--59",
booktitle = "IBP 2015 - 2015 IEEE International Broadband and Photonics Conference",
address = "United States",
note = "IEEE International Broadband and Photonics Conference, IBP 2015 ; Conference date: 23-04-2015 Through 25-04-2015",
}