TY - JOUR
T1 - Characterization of one-dimension edge roughness from far-field irradiance at subwavelength-scale precision
AU - Chu, Shu Chun
AU - Chern, Jyh Long
N1 - Funding Information:
This work was supported in part by a grant from the National Science Council of Taiwan, R.O.C., under contract No. NSC 96-2112-M-006-019-MY3.
Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2008/4/15
Y1 - 2008/4/15
N2 - It is proposed and numerically verified that the one-dimensional edge roughness of test sample can be characterized by far-field irradiance measurement at subwavelength-scale precision with a constructed aperture playing as an optical ruler. The precision of the proposed scheme of measurement could be better than 3%, even when the edge roughness is in subwavelength-scale. The influence of sample thickness on the proposed measurement scheme is also investigated and considered.
AB - It is proposed and numerically verified that the one-dimensional edge roughness of test sample can be characterized by far-field irradiance measurement at subwavelength-scale precision with a constructed aperture playing as an optical ruler. The precision of the proposed scheme of measurement could be better than 3%, even when the edge roughness is in subwavelength-scale. The influence of sample thickness on the proposed measurement scheme is also investigated and considered.
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U2 - 10.1016/j.optcom.2007.12.032
DO - 10.1016/j.optcom.2007.12.032
M3 - Article
AN - SCOPUS:39649100192
SN - 0030-4018
VL - 281
SP - 1997
EP - 2001
JO - Optics Communications
JF - Optics Communications
IS - 8
ER -