Characterization of one-dimension edge roughness from far-field irradiance at subwavelength-scale precision

Shu Chun Chu, Jyh Long Chern

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

It is proposed and numerically verified that the one-dimensional edge roughness of test sample can be characterized by far-field irradiance measurement at subwavelength-scale precision with a constructed aperture playing as an optical ruler. The precision of the proposed scheme of measurement could be better than 3%, even when the edge roughness is in subwavelength-scale. The influence of sample thickness on the proposed measurement scheme is also investigated and considered.

Original languageEnglish
Pages (from-to)1997-2001
Number of pages5
JournalOptics Communications
Volume281
Issue number8
DOIs
Publication statusPublished - 2008 Apr 15

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Physical and Theoretical Chemistry
  • Electrical and Electronic Engineering

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