Characterization of one-dimension edge roughness from far-field irradiance at subwavelength-scale precision

Shu Chun Chu; Jyh Long Chern

doi:10.1016/j.optcom.2007.12.032

Characterization of one-dimension edge roughness from far-field irradiance at subwavelength-scale precision

Shu Chun Chu
, Jyh Long Chern

Department of Physics

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

It is proposed and numerically verified that the one-dimensional edge roughness of test sample can be characterized by far-field irradiance measurement at subwavelength-scale precision with a constructed aperture playing as an optical ruler. The precision of the proposed scheme of measurement could be better than 3%, even when the edge roughness is in subwavelength-scale. The influence of sample thickness on the proposed measurement scheme is also investigated and considered.

Original language	English
Pages (from-to)	1997-2001
Number of pages	5
Journal	Optics Communications
Volume	281
Issue number	8
DOIs	https://doi.org/10.1016/j.optcom.2007.12.032
Publication status	Published - 2008 Apr 15

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Physical and Theoretical Chemistry
Electrical and Electronic Engineering

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10.1016/j.optcom.2007.12.032

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title = "Characterization of one-dimension edge roughness from far-field irradiance at subwavelength-scale precision",

abstract = "It is proposed and numerically verified that the one-dimensional edge roughness of test sample can be characterized by far-field irradiance measurement at subwavelength-scale precision with a constructed aperture playing as an optical ruler. The precision of the proposed scheme of measurement could be better than 3\%, even when the edge roughness is in subwavelength-scale. The influence of sample thickness on the proposed measurement scheme is also investigated and considered.",

author = "Chu, \{Shu Chun\} and Chern, \{Jyh Long\}",

note = "Funding Information: This work was supported in part by a grant from the National Science Council of Taiwan, R.O.C., under contract No. NSC 96-2112-M-006-019-MY3. Copyright: Copyright 2008 Elsevier B.V., All rights reserved.",

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doi = "10.1016/j.optcom.2007.12.032",

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T1 - Characterization of one-dimension edge roughness from far-field irradiance at subwavelength-scale precision

AU - Chu, Shu Chun

AU - Chern, Jyh Long

N1 - Funding Information: This work was supported in part by a grant from the National Science Council of Taiwan, R.O.C., under contract No. NSC 96-2112-M-006-019-MY3. Copyright: Copyright 2008 Elsevier B.V., All rights reserved.

PY - 2008/4/15

Y1 - 2008/4/15

N2 - It is proposed and numerically verified that the one-dimensional edge roughness of test sample can be characterized by far-field irradiance measurement at subwavelength-scale precision with a constructed aperture playing as an optical ruler. The precision of the proposed scheme of measurement could be better than 3%, even when the edge roughness is in subwavelength-scale. The influence of sample thickness on the proposed measurement scheme is also investigated and considered.

AB - It is proposed and numerically verified that the one-dimensional edge roughness of test sample can be characterized by far-field irradiance measurement at subwavelength-scale precision with a constructed aperture playing as an optical ruler. The precision of the proposed scheme of measurement could be better than 3%, even when the edge roughness is in subwavelength-scale. The influence of sample thickness on the proposed measurement scheme is also investigated and considered.

UR - https://www.scopus.com/pages/publications/39649100192

UR - https://www.scopus.com/pages/publications/39649100192#tab=citedBy

U2 - 10.1016/j.optcom.2007.12.032

DO - 10.1016/j.optcom.2007.12.032

M3 - Article

AN - SCOPUS:39649100192

SN - 0030-4018

VL - 281

SP - 1997

EP - 2001

JO - Optics Communications

JF - Optics Communications

IS - 8

ER -

Characterization of one-dimension edge roughness from far-field irradiance at subwavelength-scale precision

Abstract

All Science Journal Classification (ASJC) codes

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