Characterization of the electrical and optical properties for a-IGZO/Ag/a-IGZO triple-layer thin films with different thickness depositions on a curved glass substrate

Ying Tsung Li, Chang Fu Han, Jen Fin Lin

Research output: Contribution to journalArticle

Abstract

Nine specimens are prepared on the basis of the L9(33) orthogonal array design to evaluate the optical and electrical properties, morphology, and microstructure of a-IGZO/Ag/a- IGZO (IAI) triple-layer composite films deposited on curved glass substrates with a different radius of curvature efficiently. The experiments are arranged for the change in the three controlling factors, namely the IGZO and Ag thicknesses, and the substrate's radius of curvature. The radius of curvature has the highest contribution for the RMS surface roughness (SRq) and the mean particle size (PS). The carrier mobility (CM) and carrier concentration (CC) are proportional to each, irrespective of the controlling factors in this study. An increase in the radius of curvature can result in the increase of SRq and PS, and therefore brings in a surface scattering effect that can cause the reduction of CM as well as the enhancement of resistivity (R). In addition, a sufficiently large radius of curvature can elevate the transmittance at 550 nm and Haack's figure of merit (FOM) effectively, but it can also lower the reflectance for blue, green and red. Via the carrier injections, increasing the Ag thickness can elevate the carrier mobility and concentration significantly. The reflectance for blue, green, and red are also risen by increasing the Ag thickness. As a result of the Burstein-Moss effect, carrier concentration and optical bandgap are elevated by increasing the IGZO thickness. Additionally, the reflectance for blue, green, and red are also increased. Appropriate choices in the IGZO and Ag thicknesses and the radius of curvature can obtain the transmittance >80 %, and elevate the FOM significantly.

Original languageEnglish
Pages (from-to)3414-3431
Number of pages18
JournalOptical Materials Express
Volume9
Issue number8
DOIs
Publication statusPublished - 2019 Aug 1

Fingerprint

Carrier mobility
Carrier concentration
Electric properties
Optical properties
Glass
Thin films
Substrates
Particle size
Surface scattering
Optical band gaps
Composite films
Surface roughness
Microstructure
Experiments

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

Cite this

@article{326ea40305884b0c9700eb69146a44b0,
title = "Characterization of the electrical and optical properties for a-IGZO/Ag/a-IGZO triple-layer thin films with different thickness depositions on a curved glass substrate",
abstract = "Nine specimens are prepared on the basis of the L9(33) orthogonal array design to evaluate the optical and electrical properties, morphology, and microstructure of a-IGZO/Ag/a- IGZO (IAI) triple-layer composite films deposited on curved glass substrates with a different radius of curvature efficiently. The experiments are arranged for the change in the three controlling factors, namely the IGZO and Ag thicknesses, and the substrate's radius of curvature. The radius of curvature has the highest contribution for the RMS surface roughness (SRq) and the mean particle size (PS). The carrier mobility (CM) and carrier concentration (CC) are proportional to each, irrespective of the controlling factors in this study. An increase in the radius of curvature can result in the increase of SRq and PS, and therefore brings in a surface scattering effect that can cause the reduction of CM as well as the enhancement of resistivity (R). In addition, a sufficiently large radius of curvature can elevate the transmittance at 550 nm and Haack's figure of merit (FOM) effectively, but it can also lower the reflectance for blue, green and red. Via the carrier injections, increasing the Ag thickness can elevate the carrier mobility and concentration significantly. The reflectance for blue, green, and red are also risen by increasing the Ag thickness. As a result of the Burstein-Moss effect, carrier concentration and optical bandgap are elevated by increasing the IGZO thickness. Additionally, the reflectance for blue, green, and red are also increased. Appropriate choices in the IGZO and Ag thicknesses and the radius of curvature can obtain the transmittance >80 {\%}, and elevate the FOM significantly.",
author = "Li, {Ying Tsung} and Han, {Chang Fu} and Lin, {Jen Fin}",
year = "2019",
month = "8",
day = "1",
doi = "10.1364/OME.9.003414",
language = "English",
volume = "9",
pages = "3414--3431",
journal = "Optical Materials Express",
issn = "2159-3930",
publisher = "The Optical Society",
number = "8",

}

TY - JOUR

T1 - Characterization of the electrical and optical properties for a-IGZO/Ag/a-IGZO triple-layer thin films with different thickness depositions on a curved glass substrate

AU - Li, Ying Tsung

AU - Han, Chang Fu

AU - Lin, Jen Fin

PY - 2019/8/1

Y1 - 2019/8/1

N2 - Nine specimens are prepared on the basis of the L9(33) orthogonal array design to evaluate the optical and electrical properties, morphology, and microstructure of a-IGZO/Ag/a- IGZO (IAI) triple-layer composite films deposited on curved glass substrates with a different radius of curvature efficiently. The experiments are arranged for the change in the three controlling factors, namely the IGZO and Ag thicknesses, and the substrate's radius of curvature. The radius of curvature has the highest contribution for the RMS surface roughness (SRq) and the mean particle size (PS). The carrier mobility (CM) and carrier concentration (CC) are proportional to each, irrespective of the controlling factors in this study. An increase in the radius of curvature can result in the increase of SRq and PS, and therefore brings in a surface scattering effect that can cause the reduction of CM as well as the enhancement of resistivity (R). In addition, a sufficiently large radius of curvature can elevate the transmittance at 550 nm and Haack's figure of merit (FOM) effectively, but it can also lower the reflectance for blue, green and red. Via the carrier injections, increasing the Ag thickness can elevate the carrier mobility and concentration significantly. The reflectance for blue, green, and red are also risen by increasing the Ag thickness. As a result of the Burstein-Moss effect, carrier concentration and optical bandgap are elevated by increasing the IGZO thickness. Additionally, the reflectance for blue, green, and red are also increased. Appropriate choices in the IGZO and Ag thicknesses and the radius of curvature can obtain the transmittance >80 %, and elevate the FOM significantly.

AB - Nine specimens are prepared on the basis of the L9(33) orthogonal array design to evaluate the optical and electrical properties, morphology, and microstructure of a-IGZO/Ag/a- IGZO (IAI) triple-layer composite films deposited on curved glass substrates with a different radius of curvature efficiently. The experiments are arranged for the change in the three controlling factors, namely the IGZO and Ag thicknesses, and the substrate's radius of curvature. The radius of curvature has the highest contribution for the RMS surface roughness (SRq) and the mean particle size (PS). The carrier mobility (CM) and carrier concentration (CC) are proportional to each, irrespective of the controlling factors in this study. An increase in the radius of curvature can result in the increase of SRq and PS, and therefore brings in a surface scattering effect that can cause the reduction of CM as well as the enhancement of resistivity (R). In addition, a sufficiently large radius of curvature can elevate the transmittance at 550 nm and Haack's figure of merit (FOM) effectively, but it can also lower the reflectance for blue, green and red. Via the carrier injections, increasing the Ag thickness can elevate the carrier mobility and concentration significantly. The reflectance for blue, green, and red are also risen by increasing the Ag thickness. As a result of the Burstein-Moss effect, carrier concentration and optical bandgap are elevated by increasing the IGZO thickness. Additionally, the reflectance for blue, green, and red are also increased. Appropriate choices in the IGZO and Ag thicknesses and the radius of curvature can obtain the transmittance >80 %, and elevate the FOM significantly.

UR - http://www.scopus.com/inward/record.url?scp=85070800535&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85070800535&partnerID=8YFLogxK

U2 - 10.1364/OME.9.003414

DO - 10.1364/OME.9.003414

M3 - Article

AN - SCOPUS:85070800535

VL - 9

SP - 3414

EP - 3431

JO - Optical Materials Express

JF - Optical Materials Express

SN - 2159-3930

IS - 8

ER -