Characterization of ZnO films of surface acoustic-wave oscillators for ultraviolet sensing applications

Ching Liang Wei; Ying Chung Chen; Kuo Sheng Kao; Kuang Tsung Wu; Da Long Cheng; Po Tung Hsieh

doi:10.1117/1.3459938

Characterization of ZnO films of surface acoustic-wave oscillators for ultraviolet sensing applications

Ching Liang Wei, Ying Chung Chen, Kuo Sheng Kao, Kuang Tsung Wu, Da Long Cheng, Po Tung Hsieh

Center for Micro/Nano Science and Technology

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

A UV sensor composed of a surface acoustic wave (SAW) device and a high-frequency amplifier was constructed using a Colpitts oscillator circuit. Zinc oxide (ZnO) films of SAW devices were prepared on lithium niobate substrates with various deposition temperatures to investigate their effect on the sensitivity of UV sensors. Larger grain sizes and a better chemical composition of the ZnO films were obtained at high-deposition temperatures rather than at low-deposition temperatures. An extreme frequency shift of 264 kHz and sensitivity of 0.21 kHz/ (μW/cm²) were obtained for the ZnO-based SAW oscillator at the deposition temperature of 400 °C.

Original language	English
Article number	031009
Journal	Journal of Micro/Nanolithography, MEMS, and MOEMS
Volume	9
Issue number	3
DOIs	https://doi.org/10.1117/1.3459938
Publication status	Published - 2010

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1117/1.3459938

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title = "Characterization of ZnO films of surface acoustic-wave oscillators for ultraviolet sensing applications",

abstract = "A UV sensor composed of a surface acoustic wave (SAW) device and a high-frequency amplifier was constructed using a Colpitts oscillator circuit. Zinc oxide (ZnO) films of SAW devices were prepared on lithium niobate substrates with various deposition temperatures to investigate their effect on the sensitivity of UV sensors. Larger grain sizes and a better chemical composition of the ZnO films were obtained at high-deposition temperatures rather than at low-deposition temperatures. An extreme frequency shift of 264 kHz and sensitivity of 0.21 kHz/ (μW/cm2) were obtained for the ZnO-based SAW oscillator at the deposition temperature of 400 °C.",

author = "Wei, {Ching Liang} and Chen, {Ying Chung} and Kao, {Kuo Sheng} and Wu, {Kuang Tsung} and Cheng, {Da Long} and Hsieh, {Po Tung}",

note = "Funding Information: The authors thank the National Science Council of the Republic of China, Taiwan, for financially supporting this research under contract numbers NSC 98-2221-E-237-002 and NSC 97-2221-E-110-011-MY2.",

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doi = "10.1117/1.3459938",

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T1 - Characterization of ZnO films of surface acoustic-wave oscillators for ultraviolet sensing applications

AU - Wei, Ching Liang

AU - Chen, Ying Chung

AU - Kao, Kuo Sheng

AU - Wu, Kuang Tsung

AU - Cheng, Da Long

AU - Hsieh, Po Tung

N1 - Funding Information: The authors thank the National Science Council of the Republic of China, Taiwan, for financially supporting this research under contract numbers NSC 98-2221-E-237-002 and NSC 97-2221-E-110-011-MY2.

PY - 2010

Y1 - 2010

N2 - A UV sensor composed of a surface acoustic wave (SAW) device and a high-frequency amplifier was constructed using a Colpitts oscillator circuit. Zinc oxide (ZnO) films of SAW devices were prepared on lithium niobate substrates with various deposition temperatures to investigate their effect on the sensitivity of UV sensors. Larger grain sizes and a better chemical composition of the ZnO films were obtained at high-deposition temperatures rather than at low-deposition temperatures. An extreme frequency shift of 264 kHz and sensitivity of 0.21 kHz/ (μW/cm2) were obtained for the ZnO-based SAW oscillator at the deposition temperature of 400 °C.

AB - A UV sensor composed of a surface acoustic wave (SAW) device and a high-frequency amplifier was constructed using a Colpitts oscillator circuit. Zinc oxide (ZnO) films of SAW devices were prepared on lithium niobate substrates with various deposition temperatures to investigate their effect on the sensitivity of UV sensors. Larger grain sizes and a better chemical composition of the ZnO films were obtained at high-deposition temperatures rather than at low-deposition temperatures. An extreme frequency shift of 264 kHz and sensitivity of 0.21 kHz/ (μW/cm2) were obtained for the ZnO-based SAW oscillator at the deposition temperature of 400 °C.

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Characterization of ZnO films of surface acoustic-wave oscillators for ultraviolet sensing applications

Abstract

All Science Journal Classification (ASJC) codes

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