Characterization of ZnO:Ga transparent contact electrodes for microcrystalline silicon thin film solar cells

Kuang Chieh Lai, Chien Chih Liu, Chun hsiung Lu, Chih Hung Yeh, Mau-phon Houng

Research output: Contribution to journalReview article

29 Citations (Scopus)

Abstract

Gallium-doped zinc oxide (ZnO:Ga) thin films are of interest to the semiconductor industry as transparent conductive surfaces and as transparent contact electrode layers for applications such as microcrystalline silicon (μc-Si) thin film solar cells. Physical vapor deposition (PVD) via sputtering is commonly used to produce thin films such as ZnO:Ga, but film quality and characteristics depend significantly on the PVD processing parameters. For use as contact electrode layers in μc-Si thin film solar cells, this study investigates some of the important changes of ZnO:Ga thin films that result from varying DC magnetron PVD sputtering parameters, specifically the working power (500, 1200, and 1900 w), process gas (Ar, Ar/O2=50/0.2 sccm) and working pressure (0.74 and 1.06 Pa). Process temperature is held at 200 °C because thin film solar cells are damaged above 200 °C. Adding O2 to the Ar carrier gas improved transmittance but the resistivity suffered. However, high-sputtering power solved the resistivity problem. Additionally, the effects of the produced ZnO:Ga material when applied as multi-layer front and back layer electrodes to μc-Si thin film solar cells is evaluated in terms of open-circuit voltage (ΔVOC), short-circuit current density (ΔJSC), fill factor (ΔFF) and efficiency (Δη) of the cells.

Original languageEnglish
Pages (from-to)397-401
Number of pages5
JournalSolar Energy Materials and Solar Cells
Volume94
Issue number3
DOIs
Publication statusPublished - 2010 Mar 1

Fingerprint

Microcrystalline silicon
Silicon solar cells
Physical vapor deposition
Sputtering
Electrodes
Thin films
Gases
Zinc Oxide
Gallium
Open circuit voltage
Zinc oxide
Volatile organic compounds
Short circuit currents
Current density
Semiconductor materials
Thin film solar cells
Processing
Industry
Temperature

All Science Journal Classification (ASJC) codes

  • Renewable Energy, Sustainability and the Environment
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films

Cite this

Lai, Kuang Chieh ; Liu, Chien Chih ; Lu, Chun hsiung ; Yeh, Chih Hung ; Houng, Mau-phon. / Characterization of ZnO:Ga transparent contact electrodes for microcrystalline silicon thin film solar cells. In: Solar Energy Materials and Solar Cells. 2010 ; Vol. 94, No. 3. pp. 397-401.
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Characterization of ZnO:Ga transparent contact electrodes for microcrystalline silicon thin film solar cells. / Lai, Kuang Chieh; Liu, Chien Chih; Lu, Chun hsiung; Yeh, Chih Hung; Houng, Mau-phon.

In: Solar Energy Materials and Solar Cells, Vol. 94, No. 3, 01.03.2010, p. 397-401.

Research output: Contribution to journalReview article

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