Collisionless electron heating in inductively coupled discharges

K. C. Shaing, A. Y. Aydemir

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Abstract

A kinetic theory of collisionless electron heating is developed for inductively coupled discharges with a finite length L. The novel effect associated with the finite-length system is the resonance between the bounce motion of the electrons and the wave frequency, leading to enhanced heating. The theory is in agreement with results of electromagnetic particle simulations.

Original languageEnglish
Pages (from-to)3163-3166
Number of pages4
JournalPhysics of Plasmas
Volume4
Issue number9
DOIs
Publication statusPublished - 1997 Sep

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All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics

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