Abstract
A kinetic theory of collisionless electron heating is developed for inductively coupled discharges with a finite length L. The novel effect associated with the finite-length system is the resonance between the bounce motion of the electrons and the wave frequency, leading to enhanced heating. The theory is in agreement with results of electromagnetic particle simulations.
Original language | English |
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Pages (from-to) | 3163-3166 |
Number of pages | 4 |
Journal | Physics of Plasmas |
Volume | 4 |
Issue number | 9 |
DOIs | |
Publication status | Published - 1997 Sep |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics