Collisionless electron heating in inductively coupled discharges

K. C. Shaing; A. Y. Aydemir

doi:10.1063/1.872455

Collisionless electron heating in inductively coupled discharges

K. C. Shaing, A. Y. Aydemir

Institute of Space and Plasma Sciences

Research output: Contribution to journal › Article › peer-review

21 Citations (Scopus)

Abstract

A kinetic theory of collisionless electron heating is developed for inductively coupled discharges with a finite length L. The novel effect associated with the finite-length system is the resonance between the bounce motion of the electrons and the wave frequency, leading to enhanced heating. The theory is in agreement with results of electromagnetic particle simulations.

Original language	English
Pages (from-to)	3163-3166
Number of pages	4
Journal	Physics of Plasmas
Volume	4
Issue number	9
DOIs	https://doi.org/10.1063/1.872455
Publication status	Published - 1997 Sep

All Science Journal Classification (ASJC) codes

Condensed Matter Physics

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abstract = "A kinetic theory of collisionless electron heating is developed for inductively coupled discharges with a finite length L. The novel effect associated with the finite-length system is the resonance between the bounce motion of the electrons and the wave frequency, leading to enhanced heating. The theory is in agreement with results of electromagnetic particle simulations.",

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