Thin-film combinatorial gas sensor libraries were fabricated based on doped semiconducting SnO2 thin films. The combinatorial pulsed-laser ablation technique was applied to deposit compositionally varying arrays of sensor elements onto a prepatterned device electrode configuration. The detection of chloroform, formaldehyde, and benzene gases was demonstrated at concentrations down to 12.5 ppm through pattern recognition of signals from the arrays of sensors.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)