Combinatorial libraries of semiconductor gas sensors as inorganic electronic noses

M. A. Aronova, K. S. Chang, I. Takeuchi, H. Jabs, D. Westerheim, A. Gonzalez-Martin, J. Kim, B. Lewis

Research output: Contribution to journalArticlepeer-review

46 Citations (Scopus)

Abstract

Thin-film combinatorial gas sensor libraries were fabricated based on doped semiconducting SnO2 thin films. The combinatorial pulsed-laser ablation technique was applied to deposit compositionally varying arrays of sensor elements onto a prepatterned device electrode configuration. The detection of chloroform, formaldehyde, and benzene gases was demonstrated at concentrations down to 12.5 ppm through pattern recognition of signals from the arrays of sensors.

Original languageEnglish
Pages (from-to)1255-1257
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number6
DOIs
Publication statusPublished - 2003 Aug 11

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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