Combinatorial libraries of semiconductor gas sensors as inorganic electronic noses

M. A. Aronova, Kao-Shuo Chang, I. Takeuchi, H. Jabs, D. Westerheim, A. Gonzalez-Martin, J. Kim, B. Lewis

Research output: Contribution to journalArticle

45 Citations (Scopus)

Abstract

Thin-film combinatorial gas sensor libraries were fabricated based on doped semiconducting SnO 2 thin films. The combinatorial pulsed-laser ablation technique was applied to deposit compositionally varying arrays of sensor elements onto a prepatterned device electrode configuration. The detection of chloroform, formaldehyde, and benzene gases was demonstrated at concentrations down to 12.5 ppm through pattern recognition of signals from the arrays of sensors.

Original languageEnglish
Pages (from-to)1255-1257
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number6
DOIs
Publication statusPublished - 2003 Aug 11

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sensors
electronics
gases
thin films
formaldehyde
chloroform
pattern recognition
laser ablation
pulsed lasers
deposits
benzene
electrodes
configurations

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

Aronova, M. A., Chang, K-S., Takeuchi, I., Jabs, H., Westerheim, D., Gonzalez-Martin, A., ... Lewis, B. (2003). Combinatorial libraries of semiconductor gas sensors as inorganic electronic noses. Applied Physics Letters, 83(6), 1255-1257. https://doi.org/10.1063/1.1600822
Aronova, M. A. ; Chang, Kao-Shuo ; Takeuchi, I. ; Jabs, H. ; Westerheim, D. ; Gonzalez-Martin, A. ; Kim, J. ; Lewis, B. / Combinatorial libraries of semiconductor gas sensors as inorganic electronic noses. In: Applied Physics Letters. 2003 ; Vol. 83, No. 6. pp. 1255-1257.
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Aronova, MA, Chang, K-S, Takeuchi, I, Jabs, H, Westerheim, D, Gonzalez-Martin, A, Kim, J & Lewis, B 2003, 'Combinatorial libraries of semiconductor gas sensors as inorganic electronic noses', Applied Physics Letters, vol. 83, no. 6, pp. 1255-1257. https://doi.org/10.1063/1.1600822

Combinatorial libraries of semiconductor gas sensors as inorganic electronic noses. / Aronova, M. A.; Chang, Kao-Shuo; Takeuchi, I.; Jabs, H.; Westerheim, D.; Gonzalez-Martin, A.; Kim, J.; Lewis, B.

In: Applied Physics Letters, Vol. 83, No. 6, 11.08.2003, p. 1255-1257.

Research output: Contribution to journalArticle

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Aronova MA, Chang K-S, Takeuchi I, Jabs H, Westerheim D, Gonzalez-Martin A et al. Combinatorial libraries of semiconductor gas sensors as inorganic electronic noses. Applied Physics Letters. 2003 Aug 11;83(6):1255-1257. https://doi.org/10.1063/1.1600822