Combinatorial pulsed laser deposition using a compact high-throughout thin-film deposition flange

K. S. Chang, M. A. Aronova, I. Takeuchi

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

We describe the design and operation of our high-throughput thin-film deposition flange which is used to perform combinatorial pulsed laser deposition (PLD). The portable flange allows us to "convert" different PLD systems into combinatorial PLD systems. The use of the flange is illustrated in fabrication of a discrete gas sensor library and an epitaxial composition spread.

Original languageEnglish
Pages (from-to)224-228
Number of pages5
JournalApplied Surface Science
Volume223
Issue number1-3
DOIs
Publication statusPublished - 2004 Feb 15

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Fingerprint

Dive into the research topics of 'Combinatorial pulsed laser deposition using a compact high-throughout thin-film deposition flange'. Together they form a unique fingerprint.

Cite this