Abstract
We describe the design and operation of our high-throughput thin-film deposition flange which is used to perform combinatorial pulsed laser deposition (PLD). The portable flange allows us to "convert" different PLD systems into combinatorial PLD systems. The use of the flange is illustrated in fabrication of a discrete gas sensor library and an epitaxial composition spread.
Original language | English |
---|---|
Pages (from-to) | 224-228 |
Number of pages | 5 |
Journal | Applied Surface Science |
Volume | 223 |
Issue number | 1-3 |
DOIs | |
Publication status | Published - 2004 Feb 15 |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Surfaces and Interfaces