Combined TiO2/SnO2 material with adding Pt by sol-gel technology for humidity sensor

Wen Yang Chang, Yu Cheng Lin, Wen Wang Ke, Yu Sheng Hsieh, Nai Hao Kuo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)


In this work, the sensitivity of the humidity sensor based on hybrid thin films of TiO2/SnO2 nanostructure with Pt dopant was successfully increased. The humidity-sensitive materials, TiO 2/SnO2, were prepared by sol gel technology. The microstructure of the sensing film after calcination was investigated by Field Emission gun Scanning Electron Microscopy (FESEM) and revealed that the metal oxide hybrid had about 10 nm grain size. On order to study the effect of Pt dopant on the humidity-sensitive responses, 1 to 10 ml of Pt standard solution was added into the colloidal solution. To compare the humidity sensor of Pt dopant with that of no Pt dopant, operational frequencies and electrode spacings were set under the relative humidity from 30 % to 95 % at the ambient temperature of 22 °C. We demonstrated that adding Pt dopant remarkably enhances the sensitivity of TiO2/SnO2 humidity sensor, and further decreased the TiO2/SnO2 resistance, which was 3.3 times lower than that without Pt dopant at high humidity.

Original languageEnglish
Title of host publicationProgress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture
PublisherTrans Tech Publications Ltd
Number of pages6
EditionPART 1
ISBN (Print)0878499903, 9780878499908
Publication statusPublished - 2006
Event2005 International Conference on Advanced Manufacture, ICAM2005 - Taipei, R.O.C., Taiwan
Duration: 2005 Nov 282005 Dec 2

Publication series

NameMaterials Science Forum
NumberPART 1
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752


Other2005 International Conference on Advanced Manufacture, ICAM2005
CityTaipei, R.O.C.

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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