TY - JOUR
T1 - Command-shaping techniques for electrostatic MEMS actuation
T2 - Analysis and simulation
AU - Chen, Kuo Shen
AU - Ou, Kuang Shun
N1 - Funding Information:
Manuscript received September 14, 2006; revised December 15, 2006. This work was supported by the National Science Council of Taiwan, R.O.C., under Contract NSC-94-E-006-046. Subject Editor H. Zappe. The authors are with the Department of Mechanical Engineering, National Cheng-Kung University, Tainan 70101, Taiwan, R.O.C. (e-mail: kschen@ mail.ncku.edu.tw; [email protected]). Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/JMEMS.2007.893512
PY - 2007/6
Y1 - 2007/6
N2 - Precision positioning of microelectromechanical systems (MEMS) structures using electrostatic actuation has been widely used for optical and radio-frequency MEMS. How to achieve fast switching without exciting excessive residual vibration or structural impact is an important issue for these applications. This paper presents the analysis and simulation of applying command-shaping techniques for controlling MEMS electrostatic actuation. According to the nature of application fields, electrostatic actuators are classified into three categories: 1) lateral linear actuation; 2) vertical nonlinear actuation; and 3) pull-in actuation. Their corresponding linear or nonlinear command-shaping schemes are developed and presented. Both lumped element and continuous models of typical MEMS electrostatic actuated structures are simulated using Simulink and the finite-element method, and results indicate that the shaped command would yield a much superior response than that by the unshaped commands. Essential sensitivity studies are also conducted to examine the robustness of these shaping schemes, and results shows that within a certain level of parameter variation, these shapers are robust enough to retain the performance.
AB - Precision positioning of microelectromechanical systems (MEMS) structures using electrostatic actuation has been widely used for optical and radio-frequency MEMS. How to achieve fast switching without exciting excessive residual vibration or structural impact is an important issue for these applications. This paper presents the analysis and simulation of applying command-shaping techniques for controlling MEMS electrostatic actuation. According to the nature of application fields, electrostatic actuators are classified into three categories: 1) lateral linear actuation; 2) vertical nonlinear actuation; and 3) pull-in actuation. Their corresponding linear or nonlinear command-shaping schemes are developed and presented. Both lumped element and continuous models of typical MEMS electrostatic actuated structures are simulated using Simulink and the finite-element method, and results indicate that the shaped command would yield a much superior response than that by the unshaped commands. Essential sensitivity studies are also conducted to examine the robustness of these shaping schemes, and results shows that within a certain level of parameter variation, these shapers are robust enough to retain the performance.
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U2 - 10.1109/JMEMS.2007.893512
DO - 10.1109/JMEMS.2007.893512
M3 - Article
AN - SCOPUS:34547812173
SN - 1057-7157
VL - 16
SP - 537
EP - 549
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
IS - 3
ER -