Abstract
A new concept for materials processing in space exploits the ultra vacuum component of space for thin film epitaxial growth. The unique low earth orbit space environment is expected to yield 10-14 torr of better pressures, semi-infinite pumping speeds and large ultra vacuum volume (approx. 100 m3) without walls. These space ultra vacuum properties promise major improvement in the quality, unique nature, and the throughput of epitaxially grown materials especially in the area of semiconductors for microelectronics use. For such thin film materials there is expected a very large value added from space ultra vacuum processing, and as a result the application of the epitaxial thin film growth technology to space could lead to major commercial efforts in space.
| Original language | English |
|---|---|
| Pages (from-to) | 1.11-1.21 |
| Journal | Space Congress Proceedings |
| Publication status | Published - 1988 |
| Event | Twenty-Fifth Space Congress, Proceedings: Heritage, Dedication, Vision - Cocoa Beach, FL, USA Duration: 1988 Apr 26 → 1988 Apr 29 |
All Science Journal Classification (ASJC) codes
- Aerospace Engineering