Communication-effects of DC-bias voltage on piezoelectric and dielectric properties of Li-doped ZnO thin film

Chun Cheng Lin, Cheng Shong Hong, Chih Yu Huang, Yi-Chun Chen, Sheng-Yuan Chu

Research output: Contribution to journalArticle

Abstract

Highly (002)-oriented 3 at% Li-doped zinc oxide (LZO) thin films are fabricated using a radio frequency magnetron sputtering technique with synchronous DC-bias voltages ranging from 0 ∼ 25 V. The DC-bias voltage modifies the microstructure and thickness uniformity of the films, and therefore changes their piezoelectric and dielectric properties. The optimal values of the effective piezoelectric coefficient (19.42 pm/V) and dielectric constant (17.75) are obtained using DC-bias voltages of 20 and 25 V, respectively. The superior piezoelectric performance is due to an improved crystallization of the LZO film, while the superior dielectric performance is owing to an improved thickness uniformity.

Original languageEnglish
Pages (from-to)N40-N42
JournalECS Journal of Solid State Science and Technology
Volume5
Issue number7
DOIs
Publication statusPublished - 2016 Jan 1

Fingerprint

Bias voltage
Dielectric properties
Zinc Oxide
Zinc oxide
Thin films
Oxide films
Communication
Crystallization
Magnetron sputtering
Permittivity
Microstructure

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

Cite this

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title = "Communication-effects of DC-bias voltage on piezoelectric and dielectric properties of Li-doped ZnO thin film",
abstract = "Highly (002)-oriented 3 at{\%} Li-doped zinc oxide (LZO) thin films are fabricated using a radio frequency magnetron sputtering technique with synchronous DC-bias voltages ranging from 0 ∼ 25 V. The DC-bias voltage modifies the microstructure and thickness uniformity of the films, and therefore changes their piezoelectric and dielectric properties. The optimal values of the effective piezoelectric coefficient (19.42 pm/V) and dielectric constant (17.75) are obtained using DC-bias voltages of 20 and 25 V, respectively. The superior piezoelectric performance is due to an improved crystallization of the LZO film, while the superior dielectric performance is owing to an improved thickness uniformity.",
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Communication-effects of DC-bias voltage on piezoelectric and dielectric properties of Li-doped ZnO thin film. / Lin, Chun Cheng; Hong, Cheng Shong; Huang, Chih Yu; Chen, Yi-Chun; Chu, Sheng-Yuan.

In: ECS Journal of Solid State Science and Technology, Vol. 5, No. 7, 01.01.2016, p. N40-N42.

Research output: Contribution to journalArticle

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AU - Hong, Cheng Shong

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AU - Chen, Yi-Chun

AU - Chu, Sheng-Yuan

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