Comparative hydrogen sensing performances of Pd- and Pt-InGaP metal-oxide-semiconductor Schottky diodes

Yan Ying Tsai, Kun Wei Lin, Huey Ing Chen, Chun Tsen Lu, Hung Ming Chuang, Chun Yuan Chen, Wen Chau Liu

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)
Original languageEnglish
Pages (from-to)2471-2477
Number of pages7
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number6
DOIs
Publication statusPublished - 2003 Jan 1

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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