Comparison with electrical and optical properties of zinc oxide films deposited on the glass and PET substrates

Shu Yi Tsai; Yang Ming Lu; Jeng Jong Lu; Min Hsiung Hon

doi:10.1016/j.surfcoat.2005.07.022

Comparison with electrical and optical properties of zinc oxide films deposited on the glass and PET substrates

Shu Yi Tsai, Yang Ming Lu, Jeng Jong Lu, Min Hsiung Hon

Hierarchical Green-Energy Materials Research Center

Research output: Contribution to journal › Article › peer-review

21 Citations (Scopus)

Abstract

Transparent oxide films derivating from wide band-gap semiconductors have found wide applications in recent years. The zinc oxide has most attention because of its excellent optical and electrical properties compared with the ITO film. In this work, different kinds of substrates (the glass and PET) were used to deposit zinc oxide films by RF magnetron sputtering. The structural, electrical and optical properties were studied using glass and PET substrates. The experimental results show that the films have proud (002) orientation on both substrates. The lowest resistivity obtained is 2.9 × 10^-3 Ω cm and 4.0 × 10^-3 Ω cm when the substrate is glass and PET respectively. The average transmittance in the visible spectrum can be above 80% no matter what kind of substrate was used. The results imply that the PET is as good as the glass and open a new field of low cost, lightweight, flexible process to produce unbreakable large area optoelectronic devices.

Original language	English
Pages (from-to)	3241-3244
Number of pages	4
Journal	Surface and Coatings Technology
Volume	200
Issue number	10 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.surfcoat.2005.07.022
Publication status	Published - 2006 Feb 24

All Science Journal Classification (ASJC) codes

General Chemistry
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/j.surfcoat.2005.07.022

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title = "Comparison with electrical and optical properties of zinc oxide films deposited on the glass and PET substrates",

abstract = "Transparent oxide films derivating from wide band-gap semiconductors have found wide applications in recent years. The zinc oxide has most attention because of its excellent optical and electrical properties compared with the ITO film. In this work, different kinds of substrates (the glass and PET) were used to deposit zinc oxide films by RF magnetron sputtering. The structural, electrical and optical properties were studied using glass and PET substrates. The experimental results show that the films have proud (002) orientation on both substrates. The lowest resistivity obtained is 2.9 × 10-3 Ω cm and 4.0 × 10-3 Ω cm when the substrate is glass and PET respectively. The average transmittance in the visible spectrum can be above 80% no matter what kind of substrate was used. The results imply that the PET is as good as the glass and open a new field of low cost, lightweight, flexible process to produce unbreakable large area optoelectronic devices.",

author = "Tsai, {Shu Yi} and Lu, {Yang Ming} and Lu, {Jeng Jong} and Hon, {Min Hsiung}",

note = "Funding Information: The authors would like to thank the National Science Council of the ROC for its financial support under Contract No. NSC-93-2216-E-168-006.",

year = "2006",

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doi = "10.1016/j.surfcoat.2005.07.022",

language = "English",

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T1 - Comparison with electrical and optical properties of zinc oxide films deposited on the glass and PET substrates

AU - Tsai, Shu Yi

AU - Lu, Yang Ming

AU - Lu, Jeng Jong

AU - Hon, Min Hsiung

N1 - Funding Information: The authors would like to thank the National Science Council of the ROC for its financial support under Contract No. NSC-93-2216-E-168-006.

PY - 2006/2/24

Y1 - 2006/2/24

N2 - Transparent oxide films derivating from wide band-gap semiconductors have found wide applications in recent years. The zinc oxide has most attention because of its excellent optical and electrical properties compared with the ITO film. In this work, different kinds of substrates (the glass and PET) were used to deposit zinc oxide films by RF magnetron sputtering. The structural, electrical and optical properties were studied using glass and PET substrates. The experimental results show that the films have proud (002) orientation on both substrates. The lowest resistivity obtained is 2.9 × 10-3 Ω cm and 4.0 × 10-3 Ω cm when the substrate is glass and PET respectively. The average transmittance in the visible spectrum can be above 80% no matter what kind of substrate was used. The results imply that the PET is as good as the glass and open a new field of low cost, lightweight, flexible process to produce unbreakable large area optoelectronic devices.

AB - Transparent oxide films derivating from wide band-gap semiconductors have found wide applications in recent years. The zinc oxide has most attention because of its excellent optical and electrical properties compared with the ITO film. In this work, different kinds of substrates (the glass and PET) were used to deposit zinc oxide films by RF magnetron sputtering. The structural, electrical and optical properties were studied using glass and PET substrates. The experimental results show that the films have proud (002) orientation on both substrates. The lowest resistivity obtained is 2.9 × 10-3 Ω cm and 4.0 × 10-3 Ω cm when the substrate is glass and PET respectively. The average transmittance in the visible spectrum can be above 80% no matter what kind of substrate was used. The results imply that the PET is as good as the glass and open a new field of low cost, lightweight, flexible process to produce unbreakable large area optoelectronic devices.

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JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 10 SPEC. ISS.

ER -

Comparison with electrical and optical properties of zinc oxide films deposited on the glass and PET substrates

Abstract

All Science Journal Classification (ASJC) codes

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