Compensation to imperfect fabrication and asymmetry of micro-gyroscopes by using disturbance estimator

Nan-Chyuan Tsai, Chung Yang Sue

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


Owing to the imposed coupling accelerations such as quadrature error and cross-axis perturbation, the micro-machined gyroscope could not be unconditionally retained at resonant mode. Once the preset resonance is not sustained, the performance of the micro-gyroscope is accordingly degraded. In this paper, a direct model reference adaptive control loop which is integrated with a modified disturbance estimating observer (MDEO) is proposed to guarantee the resonant oscillations at drive mode and counterbalance the undesired disturbance caused by quadrature error and cross-axis perturbation. The parameters of controller are on-line innovated by the dynamic error between the MDEO output and expected response. In addition, Lyapunov stability theory is employed to examine the stability of the closed-loop control system. At last, the efficacy of evaluation of the exerted time-varying angular rate, which is to be detected and measured by the gyroscope, is verified by intensive simulations.

Original languageEnglish
Pages (from-to)1803-1814
Number of pages12
JournalMicrosystem Technologies
Issue number12
Publication statusPublished - 2009 Dec 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering


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