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Composite HfO 2 /Al 2 O 3 -dielectric MOS-HEMTs by using RF sputtering/ozone water oxidation
Ching Sung Lee, Hung Shi Huang, Wei Hsin Shung, Ting Ting Wu, Cheng Lung Yang, Chuan Chung Yeh, Yu Hao Liao, Bo Yi Chou, Han Yin Liu, Wei-Chou Hsu
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution