Compositional tailored sol-gel SiO2-TiO2 thin films

Crystallization, chemical bonding configuration, and optical properties

Li Lan Yang, Yi Sheng Lai, Jen-Sue Chen, P. H. Tsai, C. L. Chen, C. Jason Chang

Research output: Contribution to journalArticle

31 Citations (Scopus)

Abstract

Thin films of SiO2-TiO2 composite oxides with various SiO2:TiO2 compositions were prepared by the sol-gel method, using tetraethylorthosilicate (TEOS) and titanium tetraisopropoxide (TTIP) as precursors. The composition, crystal structure, and chemical bonding configuration of the as-deposited and annealed SiO2-TiO2 thin films were analyzed using Rutherford backscattering spectrometry (RBS), glancing incident angle x-ray diffraction (GIAXRD) and Fourier transform infrared spectroscopy (FTIR), respectively. Optical properties of the films were characterized by spectroscopic ellipsometry and ultraviolet-visible spectrophotometry. The Si/Ti ratios in the SiO2-TiO2 films agree with the TEOS/TTIP molar ratio in the sol-gel precursor. When the TEOS/(TEOS + TTIP) ratio is greater than 40%, the SiO2-TiO2 thin films remain amorphous (without formation of TiO2 crystalline phase) after annealing at temperatures as high as 700 °C. FTIR spectra indicate that the quantity of Si-O-Ti bonding can be maximized when the TEOS:TTIP in the precursor is 80%:20%. The refractive index of the SiO2-TiO2 films increases approximately linearly to the mixing ratio of TTIP/(TEOS + TTIP). However, SiO2-rich films possess higher ultraviolet-visible transmittance than the TiO2-rich films. The modification of microstructure and chemical bonding configuration in the SiO2-TiO2 films by the composition and its influence on the optical properties are discussed.

Original languageEnglish
Pages (from-to)3141-3149
Number of pages9
JournalJournal of Materials Research
Volume20
Issue number11
DOIs
Publication statusPublished - 2005 Nov 1

Fingerprint

Crystallization
Sol-gels
Optical properties
gels
crystallization
optical properties
titanium
Titanium
Thin films
thin films
configurations
Fourier transform infrared spectroscopy
Chemical analysis
infrared spectroscopy
Spectroscopic ellipsometry
Spectrophotometry
Rutherford backscattering spectroscopy
spectrophotometry
mixing ratios
Spectrometry

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Yang, Li Lan ; Lai, Yi Sheng ; Chen, Jen-Sue ; Tsai, P. H. ; Chen, C. L. ; Chang, C. Jason. / Compositional tailored sol-gel SiO2-TiO2 thin films : Crystallization, chemical bonding configuration, and optical properties. In: Journal of Materials Research. 2005 ; Vol. 20, No. 11. pp. 3141-3149.
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Compositional tailored sol-gel SiO2-TiO2 thin films : Crystallization, chemical bonding configuration, and optical properties. / Yang, Li Lan; Lai, Yi Sheng; Chen, Jen-Sue; Tsai, P. H.; Chen, C. L.; Chang, C. Jason.

In: Journal of Materials Research, Vol. 20, No. 11, 01.11.2005, p. 3141-3149.

Research output: Contribution to journalArticle

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T1 - Compositional tailored sol-gel SiO2-TiO2 thin films

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AU - Yang, Li Lan

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N2 - Thin films of SiO2-TiO2 composite oxides with various SiO2:TiO2 compositions were prepared by the sol-gel method, using tetraethylorthosilicate (TEOS) and titanium tetraisopropoxide (TTIP) as precursors. The composition, crystal structure, and chemical bonding configuration of the as-deposited and annealed SiO2-TiO2 thin films were analyzed using Rutherford backscattering spectrometry (RBS), glancing incident angle x-ray diffraction (GIAXRD) and Fourier transform infrared spectroscopy (FTIR), respectively. Optical properties of the films were characterized by spectroscopic ellipsometry and ultraviolet-visible spectrophotometry. The Si/Ti ratios in the SiO2-TiO2 films agree with the TEOS/TTIP molar ratio in the sol-gel precursor. When the TEOS/(TEOS + TTIP) ratio is greater than 40%, the SiO2-TiO2 thin films remain amorphous (without formation of TiO2 crystalline phase) after annealing at temperatures as high as 700 °C. FTIR spectra indicate that the quantity of Si-O-Ti bonding can be maximized when the TEOS:TTIP in the precursor is 80%:20%. The refractive index of the SiO2-TiO2 films increases approximately linearly to the mixing ratio of TTIP/(TEOS + TTIP). However, SiO2-rich films possess higher ultraviolet-visible transmittance than the TiO2-rich films. The modification of microstructure and chemical bonding configuration in the SiO2-TiO2 films by the composition and its influence on the optical properties are discussed.

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