Comprehensive analysis of hydrogen sensing properties of a Pd-gate metal-semiconductor high electron mobility transistor

Yan Ying Tsai, Kun Wei Lin, Huey Ing Chen, Ching Wen Hung, Tzu Pin Chen, Wen Chau Liu

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

The electric and hydrogen sensing properties of an interesting Pd-gate metal-semiconductor-type high electron mobility transistor are comprehensively studied. The dipolar layer formed by adsorbed hydrogen atoms at the semiconductor of Pd-AlGaAs interface is equivalent to a two-dimensional layer. The concentration of available hydrogen adsorption sites at the metal-semiconductor interface n¡ and the effective distance d from, the Pd-AlGaAs interface to adsorbed hydrogen atoms are 9.5 × 1013 cm-2 and 3 Å, respectively. Furthermore, the simulated curves are in excellently agreement with the experimental results.

Original languageEnglish
Article number253503
JournalApplied Physics Letters
Volume90
Issue number25
DOIs
Publication statusPublished - 2007

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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